Presentation 2023-01-27
The effect of annealing on nanoparticle-dispersed (Zn,Mg)O thin films fabricated by mist CVD
Kyosuke Tanaka, Toshihiro Nara, Tsukasa Yagasaki, Riki Ito, Tetsuya Kouno, Hiroko Kominami, Kazuhiko Hara,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English) ZnO nanoparticles dispersed (Zn,Mg)O thin films, were grown on an a-plane sapphire substrate by a mist CVD method using acetate compounds as source materials. After growth, annealing was performed to remove defects in and around the nanoparticles incorperated in the thin film. For samples grown at a growth temperature of 650 ℃ and a Mg source concentration of 30 % in the source solution, the annealing treatment at 850 ℃ enhanced the band-edge emissions oboth from a (Zn,Mg)O thin film and ZnO nanoparticles.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) mist CVD / (Zn,Mg)O / thin films growth
Paper # EID2022-7
Date of Issue 2023-01-19 (EID)

Conference Information
Committee ITE-IDY / IEIJ-SSL / EID / SID-JC / IEE-EDD
Conference Date 2023/1/26(2days)
Place (in Japanese) (See Japanese page)
Place (in English) Online (Zoom)
Topics (in Japanese) (See Japanese page)
Topics (in English)
Chair Takahiro Ishinabe(Tohoku Univ.) / / Masahiro Yamaguchi(Tokyo Inst. of Tech.)
Vice Chair / / Masayuki Kanbara(NAIST) / Tomoyuki Ishihara(Japan Display)
Secretary (Shizuoka Univ.) / (Tohoku Univ.) / Masayuki Kanbara / Tomoyuki Ishihara(NTT) / (SHARP)
Assistant / / Hiroshi Tsuji(NHK) / Mutsumi Kimura(Ryukoku Univ.) / Tomokazu Shiga(Univ. of Electro-Comm.) / Hiroko Kominami(Shizuoka Univ.) / Rumiko Yamaguchi(Akita Univ.) / Mitsuhiro Akimoto(Sanyo-Onoda City Univ)

Paper Information
Registration To Technical Group on Information Display / * / Technical Committee on Electronic Information Displays / Society for Informtion Display Japan Chapter / Technical Group on Electron Devices
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) The effect of annealing on nanoparticle-dispersed (Zn,Mg)O thin films fabricated by mist CVD
Sub Title (in English)
Keyword(1) mist CVD
Keyword(2) (Zn,Mg)O
Keyword(3) thin films growth
1st Author's Name Kyosuke Tanaka
1st Author's Affiliation Shizuoka University(Shizuoka Univ.)
2nd Author's Name Toshihiro Nara
2nd Author's Affiliation Shizuoka University(Shizuoka Univ.)
3rd Author's Name Tsukasa Yagasaki
3rd Author's Affiliation Shizuoka University(Shizuoka Univ.)
4th Author's Name Riki Ito
4th Author's Affiliation Shizuoka University(Shizuoka Univ.)
5th Author's Name Tetsuya Kouno
5th Author's Affiliation Shizuoka University(Shizuoka Univ.)
6th Author's Name Hiroko Kominami
6th Author's Affiliation Shizuoka University(Shizuoka Univ.)
7th Author's Name Kazuhiko Hara
7th Author's Affiliation Shizuoka University(Shizuoka Univ.)
Date 2023-01-27
Paper # EID2022-7
Volume (vol) vol.122
Number (no) EID-366
Page pp.pp.13-16(EID),
#Pages 4
Date of Issue 2023-01-19 (EID)