| Presentation | 2023-01-20 Evaluation of current-voltage characteristics of STJ detectors using membrane Tsuyoshi Noguchi, Go Fujii, Shigetomo Shiki, Tohru Taino, Taiga Shibasaki, Takahiro Kikuchi, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Superconducting tunnel junction (STJ) detectors can theoretically achieve several ten times higher energy resolution than conventional semiconductor detectors and are expected to be applied to X-ray fluorescence analysis of trace light elements in next-generation power semiconductors such as SiC and GaN. However, since current STJs are integrated on Si substrate, signals generated by high-energy X-rays absorbed in the Si substrate overlap with characteristic X-ray peaks of the trace light elements, making trace light element analysis difficult. In order to prevent X-ray absorption directly under the STJs, we proposed a new structure in which the STJs are integrated on a freestanding membrane by removing the Si substrate directly under the STJs. In this study, we evaluated leakage current and fabrication yield of the new structure by current-voltage characteristics. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Superconducting X-ray detector / Superconducting tunnel junction detector / STJ detector / Light element analysis / Membrane / Current-voltage characteristics |
| Paper # | SCE2022-17 |
| Date of Issue | 2023-01-13 (SCE) |
| Conference Information | |
| Committee | SCE |
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| Conference Date | 2023/1/20(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Kikai-Shinko-Kaikan Bldg. |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Superconducting Electronics |
| Chair | Yoshinao Mizugaki(Univ. of Electro-Comm.) |
| Vice Chair | |
| Secretary | (Fukuoka Inst. of Tech) |
| Assistant | Hiroyuki Akaike(Daido Univ.) |
| Paper Information | |
| Registration To | Technical Committee on Superconductive Electronics |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Evaluation of current-voltage characteristics of STJ detectors using membrane |
| Sub Title (in English) | |
| Keyword(1) | Superconducting X-ray detector |
| Keyword(2) | Superconducting tunnel junction detector |
| Keyword(3) | STJ detector |
| Keyword(4) | Light element analysis |
| Keyword(5) | Membrane |
| Keyword(6) | Current-voltage characteristics |
| 1st Author's Name | Tsuyoshi Noguchi |
| 1st Author's Affiliation | Saitama University(Saitama Univ.) |
| 2nd Author's Name | Go Fujii |
| 2nd Author's Affiliation | National Institute of Advanced Industrial Science and Technology(AIST) |
| 3rd Author's Name | Shigetomo Shiki |
| 3rd Author's Affiliation | National Institute of Advanced Industrial Science and Technology(AIST) |
| 4th Author's Name | Tohru Taino |
| 4th Author's Affiliation | Saitama University(Saitama Univ.) |
| 5th Author's Name | Taiga Shibasaki |
| 5th Author's Affiliation | Saitama University(Saitama Univ.) |
| 6th Author's Name | Takahiro Kikuchi |
| 6th Author's Affiliation | National Institute of Advanced Industrial Science and Technology(AIST) |
| Date | 2023-01-20 |
| Paper # | SCE2022-17 |
| Volume (vol) | vol.122 |
| Number (no) | SCE-347 |
| Page | pp.pp.23-26(SCE), |
| #Pages | 4 |
| Date of Issue | 2023-01-13 (SCE) |