| Presentation | 2022-12-22 [Poster Presentation] Thickness shear mode BAW resonator based on epitaxial LiNbO3 Shinya Kudo, Takahiko Yanagitani, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | LiNbO3 have been used for the SAW filters because of their high Q and k. However, LiNbO3 filter have not used in the BAW industry because thickness extensional mode kt2 in the c-axis oriented LiNbO3, which can be grown in the standard sputtering process, is significantly low compared with quasi-shear mode k352 in the bulk 180°Y-cut LiNbO3 and 147°Y-cut LiNbO3. Therefore, the mechanical thinning of bulk LiNbO3 single crystal plate has been used to fabricate the thin single crystalline layer for BAW resonators. However, wafer size of these top-down process is limited to 6 inch because the size of the bulk LiNbO3 single crystal wafer. In contrast, bottom-up process such as sputtering growth is well-developed in the 8 inch wafer such as AlN films. In this study, we report the epitaxial growth of (10-12) LiNbO3 on epitaxial (11-20) Al doped conductive ZnO layer (AZO) / (10-12) Al2O3 substrate. Shear mode acoustic properties of the epitaxial (10-12) LiNbO3 film resonator were reported. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | LiNbO3 / Sputtering deposition / Shear mode / Epitaxial growth |
| Paper # | US2022-66 |
| Date of Issue | 2022-12-15 (US) |
| Conference Information | |
| Committee | EA / US |
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| Conference Date | 2022/12/22(2days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Satellite Campus Hiroshima |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | [Joint Meeting on Acoustics and Ultrasonics Subsociety] Engineering/Electro Acoustics, Ultrasonics, etc. |
| Chair | Kenichi Furuya(Oita Univ.) / Kentaro Nakamura(Tokyo Inst. of Tech.) |
| Vice Chair | Tatsuya Kako(NTT) / Junki Ono(Tokyo Metropolitan Univ.) / Yoshikazu Koike(Shibaura Inst. of Tech.) / Yasuaki Watanabe(Tokyo Metropolitan Univ.) |
| Secretary | Tatsuya Kako(NTT) / Junki Ono(Ritsumeikan Univ.) / Yoshikazu Koike(Tohoku Univ.) / Yasuaki Watanabe(Chiba Univ.) |
| Assistant | Masato Nakayama(OSU) / Kouhei Yatabe(Tuat) / Kan Okubo(Tokyo Metropolitan Univ.) |
| Paper Information | |
| Registration To | Technical Committee on Engineering Acoustics / Technical Committee on Ultrasonics |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | [Poster Presentation] Thickness shear mode BAW resonator based on epitaxial LiNbO3 |
| Sub Title (in English) | |
| Keyword(1) | LiNbO3 |
| Keyword(2) | Sputtering deposition |
| Keyword(3) | Shear mode |
| Keyword(4) | Epitaxial growth |
| 1st Author's Name | Shinya Kudo |
| 1st Author's Affiliation | Waseda University(Wseda Univ.) |
| 2nd Author's Name | Takahiko Yanagitani |
| 2nd Author's Affiliation | Waseda University(Waseda Univ.) |
| Date | 2022-12-22 |
| Paper # | US2022-66 |
| Volume (vol) | vol.122 |
| Number (no) | US-323 |
| Page | pp.pp.86-91(US), |
| #Pages | 6 |
| Date of Issue | 2022-12-15 (US) |