| Presentation | 2022-12-22 [Poster Presentation] Quasi-shear mode excitation of c-axis tilted MgZnO epitaxial thin film Hiroki Kishi, Takahiko Yanagitani, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Thickness shear mode piezoelectric thin films with high electromechanical coupling coefficient k´352 are attractive for quasi-shear mode FBAR and SH-SAW devices. The single crystalline ZnO film with 28? tilt to the substrate normal possesses high k´35. In 2007, our group fabricated polycrystalline ZnO films with a 23? tilt to the surface normal and reported k´352 of 6.8%. In this study, we report c-axis tilted epitaxial MgZnO films grown by RF magnetron sputtering on a c-plane sapphire substrate with a 10°, 20° off-angle to the a-plane direction. The crystalline orientation was examined by XRD pole figure. In-plane six-fold symmetry which is shifted 10°, 20° to the right direction is observed. This indicates that the MgZnO thin film is epitaxially grown reflecting the 10°, 20° off-angle of the substrate. The electron diffraction image of the surface of the MgZnO film was observed by TEM. The spots pattern shows single crystal-like growth even at the surface. Quasi-shear mode k´352 of c-axis 10°and 20° tilted epitaxial MgZnO films are estimated to be 2.0% and 2.2% from shear wave conversion loss of the HBAR structure. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Thickness shear mode resonators / Shear wave ultrasonic transducers / MgZnO / Epitaxial growth |
| Paper # | US2022-62 |
| Date of Issue | 2022-12-15 (US) |
| Conference Information | |
| Committee | EA / US |
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| Conference Date | 2022/12/22(2days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Satellite Campus Hiroshima |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | [Joint Meeting on Acoustics and Ultrasonics Subsociety] Engineering/Electro Acoustics, Ultrasonics, etc. |
| Chair | Kenichi Furuya(Oita Univ.) / Kentaro Nakamura(Tokyo Inst. of Tech.) |
| Vice Chair | Tatsuya Kako(NTT) / Junki Ono(Tokyo Metropolitan Univ.) / Yoshikazu Koike(Shibaura Inst. of Tech.) / Yasuaki Watanabe(Tokyo Metropolitan Univ.) |
| Secretary | Tatsuya Kako(NTT) / Junki Ono(Ritsumeikan Univ.) / Yoshikazu Koike(Tohoku Univ.) / Yasuaki Watanabe(Chiba Univ.) |
| Assistant | Masato Nakayama(OSU) / Kouhei Yatabe(Tuat) / Kan Okubo(Tokyo Metropolitan Univ.) |
| Paper Information | |
| Registration To | Technical Committee on Engineering Acoustics / Technical Committee on Ultrasonics |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | [Poster Presentation] Quasi-shear mode excitation of c-axis tilted MgZnO epitaxial thin film |
| Sub Title (in English) | |
| Keyword(1) | Thickness shear mode resonators |
| Keyword(2) | Shear wave ultrasonic transducers |
| Keyword(3) | MgZnO |
| Keyword(4) | Epitaxial growth |
| 1st Author's Name | Hiroki Kishi |
| 1st Author's Affiliation | Waseda University(Waseda Univ.) |
| 2nd Author's Name | Takahiko Yanagitani |
| 2nd Author's Affiliation | Waseda University/JST(Waseda Univ./JST) |
| Date | 2022-12-22 |
| Paper # | US2022-62 |
| Volume (vol) | vol.122 |
| Number (no) | US-323 |
| Page | pp.pp.62-67(US), |
| #Pages | 6 |
| Date of Issue | 2022-12-15 (US) |