| Presentation | 2022-11-10 [Invited Talk] GPGPU accelerated Monte Carlo Ion implantation simulation for high energy implantation Fumie Machida, Hiroo Koshimoto, Yasuyuki Kayama, Alexander Schmidt, Inkook Jang, Satoru Yamada, Dae Sin Kim, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | |
| Paper # | SDM2022-66 |
| Date of Issue | 2022-11-03 (SDM) |
| Conference Information | |
| Committee | SDM |
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| Conference Date | 2022/11/10(2days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Online |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Process, Device, Circuit simulation, etc. |
| Chair | Shunichiro Ohmi(Tokyo Inst. of Tech.) |
| Vice Chair | Tatsuya Usami(ASM Japan) |
| Secretary | Tatsuya Usami(Tohoku Univ.) |
| Assistant | Takuji Hosoi(Kwansei Gakuin Univ.) / Takuya Futase(SanDisk) |
| Paper Information | |
| Registration To | Technical Committee on Silicon Device and Materials |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | [Invited Talk] GPGPU accelerated Monte Carlo Ion implantation simulation for high energy implantation |
| Sub Title (in English) | * |
| Keyword(1) | |
| 1st Author's Name | Fumie Machida |
| 1st Author's Affiliation | Samsung R&D Institute Japan Co., Ltd.(SRJ) |
| 2nd Author's Name | Hiroo Koshimoto |
| 2nd Author's Affiliation | Samsung R&D Institute Japan Co., Ltd.(SRJ) |
| 3rd Author's Name | Yasuyuki Kayama |
| 3rd Author's Affiliation | Samsung R&D Institute Japan Co., Ltd.(SRJ) |
| 4th Author's Name | Alexander Schmidt |
| 4th Author's Affiliation | Samsung Electronics, Co.., Ltd.(SEC) |
| 5th Author's Name | Inkook Jang |
| 5th Author's Affiliation | Samsung Electronics, Co.., Ltd.(SEC) |
| 6th Author's Name | Satoru Yamada |
| 6th Author's Affiliation | Samsung R&D Institute Japan Co., Ltd.(SRJ) |
| 7th Author's Name | Dae Sin Kim |
| 7th Author's Affiliation | Samsung Electronics, Co.., Ltd.(SEC) |
| Date | 2022-11-10 |
| Paper # | SDM2022-66 |
| Volume (vol) | vol.122 |
| Number (no) | SDM-247 |
| Page | pp.pp.13-13(SDM), |
| #Pages | 1 |
| Date of Issue | 2022-11-03 (SDM) |