| Presentation | 2022-11-17 Generalization capability improvement of fine-defect discrimination on dielectric surface using optical linear discrimination analysis filter with error detection Shingo Shimada, Jun-ichiro Sugisaka, Koichi Hirayama, Takashi Yasui, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Various optical measurement methods have been developed to precisely identify the defects on the surface of dielectric substrate. However, it is difficult to accurately identify when the defect is smaller than the wavelength of illumination because the relation of scattered waves and the defect shape becomes complicated. In this study, an optical filter is designed to discriminate the concavity and convexity of the defect. The filter is designed as optical implementation of Fisher’s linear discriminant analysis, and can discriminate by comparing the intensity after transmitting the filter with a threshold value. We further designed another filter to detect the discrimination error. Compared with a single filter, we show the effect of the second filter by numerical simulation. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | inverse-scattering analysis / optical measurement / computer-generated hologram / Fisher’s linear discriminant analysis / boundary element method |
| Paper # | EMT2022-53 |
| Date of Issue | 2022-11-10 (EMT) |
| Conference Information | |
| Committee | EMT / IEE-EMT |
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| Conference Date | 2022/11/17(3days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Kikai-Shinko-Kaikan Bldg. |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Electromagnetic Theory, etc. |
| Chair | Hiroyuki Deguchi(Doshisha Univ.) / Shinichi Furukawa(Nihon Univ.) |
| Vice Chair | Hideki Kawaguchi(Muroran Inst. of Tech) |
| Secretary | Hideki Kawaguchi(Mitsubishi Electric) / (Kyushu Sangyo Univ.) |
| Assistant | Ryo Natsuaki(Univ. of Tokyo) / Kazuki Niino(Kyoto Univ.) |
| Paper Information | |
| Registration To | Technical Committee on Electromagnetic Theory / Technical Meeting on Electromagnetic Theory |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Generalization capability improvement of fine-defect discrimination on dielectric surface using optical linear discrimination analysis filter with error detection |
| Sub Title (in English) | |
| Keyword(1) | inverse-scattering analysis |
| Keyword(2) | optical measurement |
| Keyword(3) | computer-generated hologram |
| Keyword(4) | Fisher’s linear discriminant analysis |
| Keyword(5) | boundary element method |
| 1st Author's Name | Shingo Shimada |
| 1st Author's Affiliation | Kitami Institute of Technology(Kitami Inst. Tech.) |
| 2nd Author's Name | Jun-ichiro Sugisaka |
| 2nd Author's Affiliation | Kitami Institute of Technology(Kitami Inst. Tech.) |
| 3rd Author's Name | Koichi Hirayama |
| 3rd Author's Affiliation | Kitami Institute of Technology(Kitami Inst. Tech.) |
| 4th Author's Name | Takashi Yasui |
| 4th Author's Affiliation | Kitami Institute of Technology(Kitami Inst. Tech.) |
| Date | 2022-11-17 |
| Paper # | EMT2022-53 |
| Volume (vol) | vol.122 |
| Number (no) | EMT-256 |
| Page | pp.pp.53-58(EMT), |
| #Pages | 6 |
| Date of Issue | 2022-11-10 (EMT) |