| Presentation | 2022-11-11 [Invited Talk] Implementation of Compact Model of a Metal Oxide Molecule Sensor for Self-Heating Control Yohsuke Shiiki, Shintaro Nagata, Tsunaki Takahashi, Takeshi Yanagida, Hiroki Ishikuro, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Metal oxide molecule sensor has notable advantages of low-cost fabrication and integration. However, the molecule sensor requires high temperature to cause chemical reaction with surrounding molecules, so that an external heater is required and around 1 W or higher power is consumed. One solution to decrease power consumption is using a self-heated sensor. Since the heating area is limited in the sensor itself, mW-order operation can be realized. Besides, it is also possible that selectivity of target molecule is controlled by changing sensor temperature. Creation of the compact model is beneficial to minimize total power consumption and to implementation of sensory data processing. Self-heated resistive molecule sensor was developed and compact model was proposed. After parameters are determined, simulated resistance was compared with experimentally measured resistance. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | compact model / molecule sensor / circuit simulation |
| Paper # | SDM2022-72 |
| Date of Issue | 2022-11-03 (SDM) |
| Conference Information | |
| Committee | SDM |
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| Conference Date | 2022/11/10(2days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Online |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Process, Device, Circuit simulation, etc. |
| Chair | Shunichiro Ohmi(Tokyo Inst. of Tech.) |
| Vice Chair | Tatsuya Usami(ASM Japan) |
| Secretary | Tatsuya Usami(Tohoku Univ.) |
| Assistant | Takuji Hosoi(Kwansei Gakuin Univ.) / Takuya Futase(SanDisk) |
| Paper Information | |
| Registration To | Technical Committee on Silicon Device and Materials |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | [Invited Talk] Implementation of Compact Model of a Metal Oxide Molecule Sensor for Self-Heating Control |
| Sub Title (in English) | |
| Keyword(1) | compact model |
| Keyword(2) | molecule sensor |
| Keyword(3) | circuit simulation |
| 1st Author's Name | Yohsuke Shiiki |
| 1st Author's Affiliation | Keio University(Keio Univ.) |
| 2nd Author's Name | Shintaro Nagata |
| 2nd Author's Affiliation | The University of Tokyo(Univ. Tokyo) |
| 3rd Author's Name | Tsunaki Takahashi |
| 3rd Author's Affiliation | The University of Tokyo(Univ. Tokyo) |
| 4th Author's Name | Takeshi Yanagida |
| 4th Author's Affiliation | The University of Tokyo(Univ. Tokyo) |
| 5th Author's Name | Hiroki Ishikuro |
| 5th Author's Affiliation | Keio University(Keio Univ.) |
| Date | 2022-11-11 |
| Paper # | SDM2022-72 |
| Volume (vol) | vol.122 |
| Number (no) | SDM-247 |
| Page | pp.pp.40-43(SDM), |
| #Pages | 4 |
| Date of Issue | 2022-11-03 (SDM) |