| Presentation | 2022-10-12 A Study on Hi-Resolution Wafer Map Defect Pattern Classification Using CapsNet Yuki Yamanaka, Yoshikazu Nagamura, Masayuki Arai, Satoshi Hukumoto, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | |
| Paper # | CPSY2022-22,DC2022-22 |
| Date of Issue | 2022-10-04 (CPSY, DC) |
| Conference Information | |
| Committee | CPSY / DC / IPSJ-ARC |
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| Conference Date | 2022/10/11(2days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Yuzawa Toei Hotel |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | System Architecture, Computer Systems, Dependable Computing, etc. |
| Chair | Michihiro Koibuchi(NII) / Tatsuhiro Tsuchiya(Osaka Univ.) / Tomoaki Tsumura(Nagoya Inst. of Tech.) |
| Vice Chair | Kota Nakajima(Fujitsu Lab.) / Tomoaki Tsumura(Nagoya Inst. of Tech.) / Toshinori Hosokawa(Nihon Univ.) |
| Secretary | Kota Nakajima(JAIST) / Tomoaki Tsumura(Hitachi) / Toshinori Hosokawa(Nihon Univ.) / (Chiba Univ.) |
| Assistant | Ryohei Kobayashi(Tsukuba Univ.) / Takaaki Miyajima(Meiji Univ.) |
| Paper Information | |
| Registration To | Technical Committee on Computer Systems / Technical Committee on Dependable Computing / Special Interest Group on System Architecture |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | A Study on Hi-Resolution Wafer Map Defect Pattern Classification Using CapsNet |
| Sub Title (in English) | |
| Keyword(1) | |
| 1st Author's Name | Yuki Yamanaka |
| 1st Author's Affiliation | Tokyo Metropolitan University(Tokyo Metropolitan Univ.) |
| 2nd Author's Name | Yoshikazu Nagamura |
| 2nd Author's Affiliation | Tokyo Metropolitan University(Tokyo Metropolitan Univ.) |
| 3rd Author's Name | Masayuki Arai |
| 3rd Author's Affiliation | Nhon University(Nihon Univ.) |
| 4th Author's Name | Satoshi Hukumoto |
| 4th Author's Affiliation | Tokyo Metropolitan University(Tokyo Metropolitan Univ.) |
| Date | 2022-10-12 |
| Paper # | CPSY2022-22,DC2022-22 |
| Volume (vol) | vol.122 |
| Number (no) | CPSY-204,DC-205 |
| Page | pp.pp.26-30(CPSY), pp.26-30(DC), |
| #Pages | 5 |
| Date of Issue | 2022-10-04 (CPSY, DC) |