| Presentation | 2022-10-20 Asymmetric Power Splitter using Nano-Pixel Structure Integrated with High-Mesa Sensing Waveguide Yuta Shimamura, Ryota Kuwahata, Kensei Yamauchi, Yunjin Kim, Tetsuo Tabei, Haisong Jiang, Kiichi Hamamoto, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Compact breath sensing system using optical integrated circuits have been researched for daily heath-check. In particular, a long effective optical path length of the sensing waveguide is important for the high sensitivity for the detection of disease markers in exhaled breath of ppm-order or lower. We have also proposed an asymmetric power-splitter waveguide using nano-pixels, however, the fabrication method has been a challenge because it is necessary to achieve both ultrafine processing of around 100 nm scale and deep dry-etching for high-mesa sensing waveguide which requires around 1 ?m. In this paper, we investigated an integration process of high-mesa sensing waveguide and nano-pixel asymmetric power-splitter . As a result, we have successfully realized high-mesa waveguide and an asymmetric power splitter integration by 2-step dry-etching. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | PICs / High-mesa waveguide / Power splitter / Nano-pixel / Dry-etching |
| Paper # | OCS2022-24,OPE2022-70,LQE2022-33 |
| Date of Issue | 2022-10-13 (OCS, OPE, LQE) |
| Conference Information | |
| Committee | OPE / OCS / LQE |
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| Conference Date | 2022/10/20(2days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | Toshikazu Hashimoto(NTT) / Takeshi Hoshida(Fujitsu) / Junichi Takahara(Osaka Univ.) |
| Vice Chair | Taro Arakawa(Yokohama National Univ.) / / Kosuke Nishimura(KDDI Research) |
| Secretary | Taro Arakawa(Kochi Univ. of Tech) / (Mitsubishi Electric) / Kosuke Nishimura(NTT) |
| Assistant | Yuhei Ishizaka(Kanto Gakuin Univ.) / Takeshi Umeki(NTT) / / Yoshiaki Nishijima(Yokohama National Univ.) / Nobuhiko Nishiyama(Tokyo Inst. of Tech.) |
| Paper Information | |
| Registration To | Technical Committee on OptoElectronics / Technical Committee on Optical Communication Systems / Technical Committee on Lasers and Quantum Electronics |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Asymmetric Power Splitter using Nano-Pixel Structure Integrated with High-Mesa Sensing Waveguide |
| Sub Title (in English) | |
| Keyword(1) | PICs |
| Keyword(2) | High-mesa waveguide |
| Keyword(3) | Power splitter |
| Keyword(4) | Nano-pixel |
| Keyword(5) | Dry-etching |
| 1st Author's Name | Yuta Shimamura |
| 1st Author's Affiliation | Kyushu University(Kyushu Univ.) |
| 2nd Author's Name | Ryota Kuwahata |
| 2nd Author's Affiliation | Kyushu University(Kyushu Univ.) |
| 3rd Author's Name | Kensei Yamauchi |
| 3rd Author's Affiliation | Kyushu University(Kyushu Univ.) |
| 4th Author's Name | Yunjin Kim |
| 4th Author's Affiliation | Kyushu University(Kyushu Univ.) |
| 5th Author's Name | Tetsuo Tabei |
| 5th Author's Affiliation | Hiroshima University(Hiroshima Univ.) |
| 6th Author's Name | Haisong Jiang |
| 6th Author's Affiliation | Kyushu University(Kyushu Univ.) |
| 7th Author's Name | Kiichi Hamamoto |
| 7th Author's Affiliation | Kyushu University(Kyushu Univ.) |
| Date | 2022-10-20 |
| Paper # | OCS2022-24,OPE2022-70,LQE2022-33 |
| Volume (vol) | vol.122 |
| Number (no) | OCS-216,OPE-217,LQE-218 |
| Page | pp.pp.40-44(OCS), pp.40-44(OPE), pp.40-44(LQE), |
| #Pages | 5 |
| Date of Issue | 2022-10-13 (OCS, OPE, LQE) |