| Presentation | 2022-08-18 Frequency Delta-Sigma Modulation Position Sensors using a Cavity Resonator and Their Possible Applications Koichi Maezawa, Masayuki Mori, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | A frequency delta-sigma modulation is an interesting variant of the delta-sigma modulation based on a voltage-controlled oscillator (VCO). The analog-digital converters (ADCs) based on this technique have a unique advantage of high dynamic range as well as wide frequency bandwidth. This can be applied to sensors, when the VCO is replaced by an oscillator whose oscillation frequency is dependent on an external physical quantity. This paper discusses the delta-sigma position/displacement sensors based on a cavity resonator oscillator, and their possible application to AFM/surface profiler, microwave near field microscopy. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | delta-sigma modulation / position/displacement sensor / AFM / surface profiler |
| Paper # | ED2022-18 |
| Date of Issue | 2022-08-11 (ED) |
| Conference Information | |
| Committee | ED / IEE-BMS / IEE-MSS |
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| Conference Date | 2022/8/18(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Kikai-Shinko-Kaikan Bldg. B3-2 |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | Hiroki Fujishiro(Tokyo Univ. of Science) / 工藤 寛之(明治大学) / 佐々木 実(豊田工業大学) |
| Vice Chair | Seiya Sakai(Hokkaido Univ.) / / 寒川 雅之(新潟大学) |
| Secretary | Seiya Sakai(Saga Univ.) / (NTT) / 寒川 雅之(豊橋技術科学大学) |
| Assistant | Masatoshi Koyama(Osaka Inst. of Tech.) / Yoshitugu Yamamoto(Mitsubishi Electric) / / 神田 健介(兵庫県立大学) |
| Paper Information | |
| Registration To | Technical Committee on Electron Devices / Technical Committee on Bio Micro Systems / Technical Committee on Micromachine and Sensor System |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Frequency Delta-Sigma Modulation Position Sensors using a Cavity Resonator and Their Possible Applications |
| Sub Title (in English) | |
| Keyword(1) | delta-sigma modulation |
| Keyword(2) | position/displacement sensor |
| Keyword(3) | AFM |
| Keyword(4) | surface profiler |
| 1st Author's Name | Koichi Maezawa |
| 1st Author's Affiliation | University of Toyama(Univ. Toyama) |
| 2nd Author's Name | Masayuki Mori |
| 2nd Author's Affiliation | University of Toyama(Univ. Toyama) |
| Date | 2022-08-18 |
| Paper # | ED2022-18 |
| Volume (vol) | vol.122 |
| Number (no) | ED-152 |
| Page | pp.pp.5-8(ED), |
| #Pages | 4 |
| Date of Issue | 2022-08-11 (ED) |