| Presentation | 2022-08-08 [Invited Talk] Optimal Cell Structure/Operation Design of 3D Semicircular Split-gate Cells for Ultra-high-density Flash Memory Tetsu Morooka, |
|---|---|
| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Control gate split cell structure for increasing the cell density by foot-print reduction has several challenges such as leakage current of back-side cells, P/E window reduction due the fringing field effect, and random telegraph noise (RTN) increase due to smaller cell area. In this work, we overcome these challenges by optimizing read operation and cell structures, and experimentally demonstrate more than four bit/cell operation by split-gate cell arrays. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | 3D Flash Memory / Bit density / Split-gate / Floating gate / Multi-bits/cell |
| Paper # | SDM2022-36,ICD2022-4 |
| Date of Issue | 2022-08-01 (SDM, ICD) |
| Conference Information | |
| Committee | ICD / SDM / ITE-IST |
|---|---|
| Conference Date | 2022/8/8(3days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Analog, Mixed Analog and Digital, RF, and Sensor Interface, Low Voltage/Low Power Techniques, Novel Devices/Circuits, and the Applications |
| Chair | Masafumi Takahashi(Kioxia) / Shunichiro Ohmi(Tokyo Inst. of Tech.) / 秋田 純一(金沢大) |
| Vice Chair | Makoto Ikeda(Univ. of Tokyo) / Tatsuya Usami(ASM Japan) / 池辺 将之(北大) / 廣瀬 裕(パナソニック) |
| Secretary | Makoto Ikeda(Shinshu Univ.) / Tatsuya Usami(TSMC) / 池辺 将之(Tohoku Univ.) / 廣瀬 裕(Panasonic) |
| Assistant | Jun Shiomi(Osaka Univ.) / Yoshiaki Yoshihara(キオクシア) / Takeshi Kuboki(Sony Semiconductor Solutions) / Takuji Hosoi(Kwansei Gakuin Univ.) / Takuya Futase(SanDisk) / 山下 雄一郎(TSMC) / 大倉 俊介(立命館大) / 竹本 良章(メムスコア) |
| Paper Information | |
| Registration To | Technical Committee on Integrated Circuits and Devices / Technical Committee on Silicon Device and Materials / Technical Group on Information Sensing Technologies |
|---|---|
| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | [Invited Talk] Optimal Cell Structure/Operation Design of 3D Semicircular Split-gate Cells for Ultra-high-density Flash Memory |
| Sub Title (in English) | |
| Keyword(1) | 3D Flash Memory |
| Keyword(2) | Bit density |
| Keyword(3) | Split-gate |
| Keyword(4) | Floating gate |
| Keyword(5) | Multi-bits/cell |
| 1st Author's Name | Tetsu Morooka |
| 1st Author's Affiliation | Kioxia Corp.(Kioxia) |
| Date | 2022-08-08 |
| Paper # | SDM2022-36,ICD2022-4 |
| Volume (vol) | vol.122 |
| Number (no) | SDM-148,ICD-149 |
| Page | pp.pp.12-12(SDM), pp.12-12(ICD), |
| #Pages | 1 |
| Date of Issue | 2022-08-01 (SDM, ICD) |