Presentation 2022-07-18
[Invited Talk] Formation of organic-inorganic multilayered structure by ion-assisted deposition polymerization
Takumi Miyayama, Hiroaki Usui,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English) Organic monomer material of stearyl acrylate (SA) and organic-inorganic hybrid material of 3-methacryloyl-oxypropylheptaisobutyl-T8-silsesquioxane (BuPOSSMA), which has a core of SiO2 nano-cage, were deposited by ion-assisted deposition (IAD) method. Irradiation of Ar ion beam during the vapor deposition enhanced polymerization of these materials, enabling improvement in surface smoothness and adhesion strength. In addition, SA and BuPOSSMA were accumulated alternately by IAD on aluminum surface modified with a thiol-terminated self-assembled monolayer. As a consequence, organic/hybrid polymer multilayer structures having a layer thickness of a few nm were obtained. On the other hand, the conventional vapor deposition was unable to construct such a nanometric multilayer structure.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) Vapor Deposition Polymerization / Organic-Inorganic Hybrid Material / Multilayer / POSS / Silsesquioxane
Paper # OME2022-14
Date of Issue 2022-07-11 (OME)

Conference Information
Committee OME / IEE-DEI
Conference Date 2022/7/18(2days)
Place (in Japanese) (See Japanese page)
Place (in English) Karuizawa-machi Tourism promotion center
Topics (in Japanese) (See Japanese page)
Topics (in English) Organic film, Organic-Bio devices, etc.
Chair Toshiki Yamada(NICT) / 高橋 俊裕(電力中央研究所)
Vice Chair Eiji Itoh(Shinshu Univ.)
Secretary Eiji Itoh(Osaka Univ.) / (Tokyo Univ. of Agriculture and Tech.)
Assistant Yoshiyuki Seike(Aichi Inst. of Tech.) / Akira Baba(Niigata Univ.) / 梅本 貴弘(三菱電機) / 栗本 宗明(名古屋大学)

Paper Information
Registration To Technical Committee on Organic Molecular Electronics / Technical Meeting on Dielectrics and Electrical Insulation
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) [Invited Talk] Formation of organic-inorganic multilayered structure by ion-assisted deposition polymerization
Sub Title (in English)
Keyword(1) Vapor Deposition Polymerization
Keyword(2) Organic-Inorganic Hybrid Material
Keyword(3) Multilayer
Keyword(4) POSS
Keyword(5) Silsesquioxane
1st Author's Name Takumi Miyayama
1st Author's Affiliation Tokyo University of Agriculture and Technology(Tokyo Univ. Agricul. & Technol.)
2nd Author's Name Hiroaki Usui
2nd Author's Affiliation Tokyo University of Agriculture and Technology(Tokyo Univ. Agricul. & Technol.)
Date 2022-07-18
Paper # OME2022-14
Volume (vol) vol.122
Number (no) OME-116
Page pp.pp.1-5(OME),
#Pages 5
Date of Issue 2022-07-11 (OME)