| Presentation | 2022-06-21 [Invited Lecture] Study on the next-generation high frequency deivices using operando nano x-ray spectroscopy Hirokakazu Fukidome, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | For realizing SDGs, the ultrahigh-speed transistors using low-environmnetal load materias, such as those suing 2D materials, should be developed. For this purpose, we have exploited operando nano x-ray microscopies which observe electronic states under device operation conditions. These spectroscopies found interfacial dynamics of electronic properties which could not be observed traditional methods. We are trying in improving device performamces, based on the findings. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | operando nano x-ray spectroscopy / 2D materials / Trnasistor |
| Paper # | SDM2022-27 |
| Date of Issue | 2022-06-14 (SDM) |
| Conference Information | |
| Committee | SDM |
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| Conference Date | 2022/6/21(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Nagoya Univ. VBL3F |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Material Science and Process Technology for MOS Devices, Memories, and Power Devices |
| Chair | Hiroshige Hirano(TowerPartners Semiconductor) |
| Vice Chair | Shunichiro Ohmi(Tokyo Inst. of Tech.) |
| Secretary | Shunichiro Ohmi(AIST) |
| Assistant | Taiji Noda(Panasonic) / Tomoyuki Suwa(Tohoku Univ.) |
| Paper Information | |
| Registration To | Technical Committee on Silicon Device and Materials |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | [Invited Lecture] Study on the next-generation high frequency deivices using operando nano x-ray spectroscopy |
| Sub Title (in English) | |
| Keyword(1) | operando nano x-ray spectroscopy |
| Keyword(2) | 2D materials |
| Keyword(3) | Trnasistor |
| 1st Author's Name | Hirokakazu Fukidome |
| 1st Author's Affiliation | Tohoku University(Tohoku Univ.) |
| Date | 2022-06-21 |
| Paper # | SDM2022-27 |
| Volume (vol) | vol.122 |
| Number (no) | SDM-84 |
| Page | pp.pp.13-15(SDM), |
| #Pages | 3 |
| Date of Issue | 2022-06-14 (SDM) |