| Presentation | 2022-07-29 A Study Ion Implanter Monitoring Based on Decision Trees/Forests Yu-Ling Lin, Qiangfu Zhao, Shih-Cheng Horng, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | |
| Paper # | R2022-9 |
| Date of Issue | 2022-07-22 (R) |
| Conference Information | |
| Committee | R |
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| Conference Date | 2022/7/29(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Reliability Theory, Communication Network Reliability, Reliability General |
| Chair | Tadashi Dohi(Hiroshima Univ.) |
| Vice Chair | Yasushi Kadota(Ricoh) |
| Secretary | Yasushi Kadota(Hiroshima Univ.) |
| Assistant | Shinji Yokogawa(Univ. of Electro-Comm.) / Takahide Yoshikawa(Fujitsu Lab.) / Takenori Sakumura(Housei Univ.) |
| Paper Information | |
| Registration To | Technical Committee on Reliability |
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| Language | ENG |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | A Study Ion Implanter Monitoring Based on Decision Trees/Forests |
| Sub Title (in English) | |
| Keyword(1) | |
| 1st Author's Name | Yu-Ling Lin |
| 1st Author's Affiliation | The University of Aizu(UoA) |
| 2nd Author's Name | Qiangfu Zhao |
| 2nd Author's Affiliation | The University of Aizu(UoA) |
| 3rd Author's Name | Shih-Cheng Horng |
| 3rd Author's Affiliation | Chaoyang University of Technology(CYUT) |
| Date | 2022-07-29 |
| Paper # | R2022-9 |
| Volume (vol) | vol.122 |
| Number (no) | R-140 |
| Page | pp.pp.1-6(R), |
| #Pages | 6 |
| Date of Issue | 2022-07-22 (R) |