Presentation | 2022-06-21 [Invited Talk] Superiority of counter-doped MOSFET from the viewpoint of oxide/4H-SiC interface property Shigehisa Shibayama, Takuma Doi, Mitsuo Sakashita, Noriyuki Taoka, Mitsuaki Shimizu, Osamu Nakatsuka, |
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PDF Download Page | PDF download Page Link |
Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | |
Paper # | SDM2022-24 |
Date of Issue | 2022-06-14 (SDM) |
Conference Information | |
Committee | SDM |
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Conference Date | 2022/6/21(1days) |
Place (in Japanese) | (See Japanese page) |
Place (in English) | Nagoya Univ. VBL3F |
Topics (in Japanese) | (See Japanese page) |
Topics (in English) | Material Science and Process Technology for MOS Devices, Memories, and Power Devices |
Chair | Hiroshige Hirano(TowerPartners Semiconductor) |
Vice Chair | Shunichiro Ohmi(Tokyo Inst. of Tech.) |
Secretary | Shunichiro Ohmi(AIST) |
Assistant | Taiji Noda(Panasonic) / Tomoyuki Suwa(Tohoku Univ.) |
Paper Information | |
Registration To | Technical Committee on Silicon Device and Materials |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | [Invited Talk] Superiority of counter-doped MOSFET from the viewpoint of oxide/4H-SiC interface property |
Sub Title (in English) | |
Keyword(1) | |
1st Author's Name | Shigehisa Shibayama |
1st Author's Affiliation | Nagoya University(Nagoya Univ.) |
2nd Author's Name | Takuma Doi |
2nd Author's Affiliation | Nagoya University(Nagoya Univ.) |
3rd Author's Name | Mitsuo Sakashita |
3rd Author's Affiliation | Nagoya University(Nagoya Univ.) |
4th Author's Name | Noriyuki Taoka |
4th Author's Affiliation | Nagoya University(Nagoya Univ.) |
5th Author's Name | Mitsuaki Shimizu |
5th Author's Affiliation | AIST-NU GaN-OIL(AIST) |
6th Author's Name | Osamu Nakatsuka |
6th Author's Affiliation | Nagoya University(Nagoya Univ.) |
Date | 2022-06-21 |
Paper # | SDM2022-24 |
Volume (vol) | vol.122 |
Number (no) | SDM-84 |
Page | pp.pp.1-4(SDM), |
#Pages | 4 |
Date of Issue | 2022-06-14 (SDM) |