Presentation | 2022-06-21 Formation of Al(111) Thin Layer on Si(111) and Control of Surface Si Segregation by Thermal Annealing Taiki Sakai, Keigo Matsushita, Akio Ohta, Noriyuki Taoka, Katsunori Makihara, Seiichi Miyazaki, |
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PDF Download Page | PDF download Page Link |
Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | |
Paper # | SDM2022-32 |
Date of Issue | 2022-06-14 (SDM) |
Conference Information | |
Committee | SDM |
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Conference Date | 2022/6/21(1days) |
Place (in Japanese) | (See Japanese page) |
Place (in English) | Nagoya Univ. VBL3F |
Topics (in Japanese) | (See Japanese page) |
Topics (in English) | Material Science and Process Technology for MOS Devices, Memories, and Power Devices |
Chair | Hiroshige Hirano(TowerPartners Semiconductor) |
Vice Chair | Shunichiro Ohmi(Tokyo Inst. of Tech.) |
Secretary | Shunichiro Ohmi(AIST) |
Assistant | Taiji Noda(Panasonic) / Tomoyuki Suwa(Tohoku Univ.) |
Paper Information | |
Registration To | Technical Committee on Silicon Device and Materials |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Formation of Al(111) Thin Layer on Si(111) and Control of Surface Si Segregation by Thermal Annealing |
Sub Title (in English) | |
Keyword(1) | |
1st Author's Name | Taiki Sakai |
1st Author's Affiliation | Nagoya University(Nagoya Univ.) |
2nd Author's Name | Keigo Matsushita |
2nd Author's Affiliation | Nagoya University(Nagoya Univ.) |
3rd Author's Name | Akio Ohta |
3rd Author's Affiliation | Nagoya University(Nagoya Univ.) |
4th Author's Name | Noriyuki Taoka |
4th Author's Affiliation | Nagoya University(Nagoya Univ.) |
5th Author's Name | Katsunori Makihara |
5th Author's Affiliation | Nagoya University(Nagoya Univ.) |
6th Author's Name | Seiichi Miyazaki |
6th Author's Affiliation | Nagoya University(Nagoya Univ.) |
Date | 2022-06-21 |
Paper # | SDM2022-32 |
Volume (vol) | vol.122 |
Number (no) | SDM-84 |
Page | pp.pp.31-34(SDM), |
#Pages | 4 |
Date of Issue | 2022-06-14 (SDM) |