| Presentation | 2022-05-27 Ion Implanter Monitoring Based on Machine Learning Yu-Ling Lin, Qiangfu Zhao, |
|---|---|
| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | |
| Paper # | SC2022-3 |
| Date of Issue | 2022-05-20 (SC) |
| Conference Information | |
| Committee | SC |
|---|---|
| Conference Date | 2022/5/27(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Online |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | AI Service and Digital Transformation, and general topics |
| Chair | Shinji Kikuchi(NIMS) |
| Vice Chair | Yoji Yamato(NTT) / Kosaku Kimura(Fujitsu) |
| Secretary | Yoji Yamato(Kobe Univ.) / Kosaku Kimura(Tokyo Univ. of Tech.) |
| Assistant | Shin Tezuka(Hitachi) / Takao Nakaguchi(KCGI) |
| Paper Information | |
| Registration To | Technical Committee on Service Computing |
|---|---|
| Language | ENG |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Ion Implanter Monitoring Based on Machine Learning |
| Sub Title (in English) | |
| Keyword(1) | |
| 1st Author's Name | Yu-Ling Lin |
| 1st Author's Affiliation | The University of Aizu(UoA) |
| 2nd Author's Name | Qiangfu Zhao |
| 2nd Author's Affiliation | The University of Aizu(UoA) |
| Date | 2022-05-27 |
| Paper # | SC2022-3 |
| Volume (vol) | vol.122 |
| Number (no) | SC-50 |
| Page | pp.pp.13-18(SC), |
| #Pages | 6 |
| Date of Issue | 2022-05-20 (SC) |