| Presentation | 2022-06-16 Study on cause analysis method for tool to tool matching management for CD-SEM Naoya Tanahashi, Shintaro Takada, |
|---|---|
| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | |
| Paper # | R2022-6 |
| Date of Issue | 2022-06-09 (R) |
| Conference Information | |
| Committee | R |
|---|---|
| Conference Date | 2022/6/16(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Online |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Reliability General |
| Chair | Tadashi Dohi(Hiroshima Univ.) |
| Vice Chair | Yasushi Kadota(Ricoh) |
| Secretary | Yasushi Kadota(Hiroshima Univ.) |
| Assistant | Shinji Yokogawa(Univ. of Electro-Comm.) / Takahide Yoshikawa(Fujitsu Lab.) / Takenori Sakumura(Housei Univ.) |
| Paper Information | |
| Registration To | Technical Committee on Reliability |
|---|---|
| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Study on cause analysis method for tool to tool matching management for CD-SEM |
| Sub Title (in English) | |
| Keyword(1) | |
| Keyword(2) | |
| Keyword(3) | |
| Keyword(4) | |
| 1st Author's Name | Naoya Tanahashi |
| 1st Author's Affiliation | Hitachi, Ltd.(Hitachi) |
| 2nd Author's Name | Shintaro Takada |
| 2nd Author's Affiliation | Hitachi, Ltd.(Hitachi) |
| Date | 2022-06-16 |
| Paper # | R2022-6 |
| Volume (vol) | vol.122 |
| Number (no) | R-79 |
| Page | pp.pp.1-6(R), |
| #Pages | 6 |
| Date of Issue | 2022-06-09 (R) |