Presentation 2022-04-21
Influence of the thermal annealing temperature and atmosphere on channel conductance in the ZnO thin film transistor
Naoya Onizawa, Kazuki Yoshida, Kentarou Saitou, Kensaku Kanomata, Masanori Miura, Fumihiko Hirose,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English)
Keyword(in Japanese) (See Japanese page)
Keyword(in English)
Paper # ED2022-2
Date of Issue 2022-04-14 (ED)

Conference Information
Committee ED
Conference Date 2022/4/21(1days)
Place (in Japanese) (See Japanese page)
Place (in English) Online
Topics (in Japanese) (See Japanese page)
Topics (in English)
Chair Hiroki Fujishiro(Tokyo Univ. of Science)
Vice Chair Seiya Sakai(Hokkaido Univ.)
Secretary Seiya Sakai(Fjitsu Lab.)
Assistant Ryota Isonoi(SCIOCS) / Yoshitugu Yamamoto(Mitsubishi Electric)

Paper Information
Registration To Technical Committee on Electron Devices
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Influence of the thermal annealing temperature and atmosphere on channel conductance in the ZnO thin film transistor
Sub Title (in English)
Keyword(1)
Keyword(2)
Keyword(3)
1st Author's Name Naoya Onizawa
1st Author's Affiliation Yamagata University(Yamagata Univ)
2nd Author's Name Kazuki Yoshida
2nd Author's Affiliation Yamagata University(Yamagata Univ)
3rd Author's Name Kentarou Saitou
3rd Author's Affiliation Yamagata University(Yamagata Univ)
4th Author's Name Kensaku Kanomata
4th Author's Affiliation Yamagata University(Yamagata Univ)
5th Author's Name Masanori Miura
5th Author's Affiliation Yamagata University(Yamagata Univ)
6th Author's Name Fumihiko Hirose
6th Author's Affiliation Yamagata University(Yamagata Univ)
Date 2022-04-21
Paper # ED2022-2
Volume (vol) vol.122
Number (no) ED-7
Page pp.pp.5-8(ED),
#Pages 4
Date of Issue 2022-04-14 (ED)