Presentation 2022-03-01
CapsNetを用いた多重欠陥ウェハマップ不良パターンの分類に関する一考察
Itsuki Fujita, Masayuki Arai, Tadakatsu Matsuda, Yoshikazu Nagamura, Satoshi Fukumoto,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English)
Keyword(in Japanese) (See Japanese page)
Keyword(in English)
Paper # DC2021-78
Date of Issue 2022-02-22 (DC)

Conference Information
Committee DC
Conference Date 2022/3/1(1days)
Place (in Japanese) (See Japanese page)
Place (in English) Kikai-Shinko-Kaikan Bldg.
Topics (in Japanese) (See Japanese page)
Topics (in English)
Chair Hiroshi Takahashi(Ehime Univ.)
Vice Chair Tatsuhiro Tsuchiya(Osaka Univ.)
Secretary Tatsuhiro Tsuchiya(Nihon Univ.)
Assistant

Paper Information
Registration To Technical Committee on Dependable Computing
Language JPN-ONLY
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English)
Sub Title (in English)
Keyword(1)
1st Author's Name Itsuki Fujita
1st Author's Affiliation Tokyo Metropolitan University(Tokyo Metro. Univ.)
2nd Author's Name Masayuki Arai
2nd Author's Affiliation Nihon University(Nihon Univ.)
3rd Author's Name Tadakatsu Matsuda
3rd Author's Affiliation Nihon University(Nihon Univ.)
4th Author's Name Yoshikazu Nagamura
4th Author's Affiliation Tokyo Metropolitan University(Tokyo Metro. Univ.)
5th Author's Name Satoshi Fukumoto
5th Author's Affiliation Tokyo Metropolitan University(Tokyo Metro. Univ.)
Date 2022-03-01
Paper # DC2021-78
Volume (vol) vol.121
Number (no) DC-388
Page pp.pp.81-86(DC),
#Pages 6
Date of Issue 2022-02-22 (DC)