| Presentation | 2022-02-04 [Invited Talk] Advanced Damascene Integration with Self Assembled Monolayer (SAM) Hiroyuki Nagai, Mitsuaki Iwashita, Yuki Kikuchi, Kawasaki Hiroaki, Gyana Pattanaik, Keiichi Fujita, Kazutoshi Iwai, Hiroyuki Komatsu, Yuuki Ozaki, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | |
| Paper # | SDM2021-75 |
| Date of Issue | 2022-01-28 (SDM) |
| Conference Information | |
| Committee | SDM |
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| Conference Date | 2022/2/4(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Online |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | Hiroshige Hirano(TowerPartners Semiconductor) |
| Vice Chair | Shunichiro Ohmi(Tokyo Inst. of Tech.) |
| Secretary | Shunichiro Ohmi(AIST) |
| Assistant | Taiji Noda(Panasonic) / Tomoyuki Suwa(Tohoku Univ.) |
| Paper Information | |
| Registration To | Technical Committee on Silicon Device and Materials |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | [Invited Talk] Advanced Damascene Integration with Self Assembled Monolayer (SAM) |
| Sub Title (in English) | |
| Keyword(1) | |
| 1st Author's Name | Hiroyuki Nagai |
| 1st Author's Affiliation | Tokyo Electron Limited(TEL) |
| 2nd Author's Name | Mitsuaki Iwashita |
| 2nd Author's Affiliation | Tokyo Electron Limited(TEL) |
| 3rd Author's Name | Yuki Kikuchi |
| 3rd Author's Affiliation | Tokyo Electron Limited(TEL) |
| 4th Author's Name | Kawasaki Hiroaki |
| 4th Author's Affiliation | TEL Technology Center, America, LLC(TTCA) |
| 5th Author's Name | Gyana Pattanaik |
| 5th Author's Affiliation | TEL Technology Center, America, LLC(TTCA) |
| 6th Author's Name | Keiichi Fujita |
| 6th Author's Affiliation | Tokyo Electron Kyushu Limited(TKL) |
| 7th Author's Name | Kazutoshi Iwai |
| 7th Author's Affiliation | Tokyo Electron America, Inc.(TEA) |
| 8th Author's Name | Hiroyuki Komatsu |
| 8th Author's Affiliation | JSR corporation(JSR) |
| 9th Author's Name | Yuuki Ozaki |
| 9th Author's Affiliation | JSR corporation(JSR) |
| Date | 2022-02-04 |
| Paper # | SDM2021-75 |
| Volume (vol) | vol.121 |
| Number (no) | SDM-366 |
| Page | pp.pp.5-8(SDM), |
| #Pages | 4 |
| Date of Issue | 2022-01-28 (SDM) |