| Presentation | 2022-01-31 [Invited Talk] **** Keiichi Nakazawa, Junpei Yamamoto, Shigetaka Mori, Shintaro Okamoto, Akito Shimizu, Koichi Baba, Nobutoshi Fujii, Mutsuo Uehara, Katsunori Hiramatsu, Hideomi Kumano, Akira Matsumoto, Koichiro Zaitsu, Hidetoshi Ohnuma, Keiji Tatani, Tomoyuki Hirano, Hayato Iwamoto, |
|---|---|
| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We developed a new structure of pixel transistors stacked over photodiode named “2-Layer Transistor Pixel Stacked CMOS Image Sensor” (2-Layer Pixel). It was fabricated by 3D sequential process integration with new process techniques, such as thermally stable wafer bonding and deep contacts. With this technology, we successfully increased AMP size and demonstrated backside-illuminated CMOS image sensor of 6752 x 4928 pixels at 0.7um pitch to prove its functionality and integrity. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | 3D Sequential / 2-Layer Pixel / wafer bonding / deep contact |
| Paper # | SDM2021-73 |
| Date of Issue | 2022-01-24 (SDM) |
| Conference Information | |
| Committee | SDM |
|---|---|
| Conference Date | 2022/1/31(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Online |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | Hiroshige Hirano(TowerPartners Semiconductor) |
| Vice Chair | Shunichiro Ohmi(Tokyo Inst. of Tech.) |
| Secretary | Shunichiro Ohmi(AIST) |
| Assistant | Taiji Noda(Panasonic) / Tomoyuki Suwa(Tohoku Univ.) |
| Paper Information | |
| Registration To | Technical Committee on Silicon Device and Materials |
|---|---|
| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | [Invited Talk] **** |
| Sub Title (in English) | |
| Keyword(1) | 3D Sequential |
| Keyword(2) | 2-Layer Pixel |
| Keyword(3) | wafer bonding |
| Keyword(4) | deep contact |
| 1st Author's Name | Keiichi Nakazawa |
| 1st Author's Affiliation | Sony Semiconductor Solutions(Sony Semiconductor Solutions) |
| 2nd Author's Name | Junpei Yamamoto |
| 2nd Author's Affiliation | Sony Semiconductor Solutions(Sony Semiconductor Solutions) |
| 3rd Author's Name | Shigetaka Mori |
| 3rd Author's Affiliation | Sony Semiconductor Solutions(Sony Semiconductor Solutions) |
| 4th Author's Name | Shintaro Okamoto |
| 4th Author's Affiliation | Sony Semiconductor Solutions(Sony Semiconductor Solutions) |
| 5th Author's Name | Akito Shimizu |
| 5th Author's Affiliation | Sony Semiconductor Solutions(Sony Semiconductor Solutions) |
| 6th Author's Name | Koichi Baba |
| 6th Author's Affiliation | Sony Semiconductor Solutions(Sony Semiconductor Solutions) |
| 7th Author's Name | Nobutoshi Fujii |
| 7th Author's Affiliation | Sony Semiconductor Solutions(Sony Semiconductor Solutions) |
| 8th Author's Name | Mutsuo Uehara |
| 8th Author's Affiliation | Sony Semiconductor Solutions(Sony Semiconductor Solutions) |
| 9th Author's Name | Katsunori Hiramatsu |
| 9th Author's Affiliation | Sony Semiconductor Solutions(Sony Semiconductor Solutions) |
| 10th Author's Name | Hideomi Kumano |
| 10th Author's Affiliation | Sony Semiconductor Solutions(Sony Semiconductor Solutions) |
| 11th Author's Name | Akira Matsumoto |
| 11th Author's Affiliation | Sony Semiconductor Solutions(Sony Semiconductor Solutions) |
| 12th Author's Name | Koichiro Zaitsu |
| 12th Author's Affiliation | Sony Semiconductor Solutions(Sony Semiconductor Solutions) |
| 13th Author's Name | Hidetoshi Ohnuma |
| 13th Author's Affiliation | Sony Semiconductor Solutions(Sony Semiconductor Solutions) |
| 14th Author's Name | Keiji Tatani |
| 14th Author's Affiliation | Sony Semiconductor Solutions(Sony Semiconductor Solutions) |
| 15th Author's Name | Tomoyuki Hirano |
| 15th Author's Affiliation | Sony Semiconductor Solutions(Sony Semiconductor Solutions) |
| 16th Author's Name | Hayato Iwamoto |
| 16th Author's Affiliation | Sony Semiconductor Solutions(Sony Semiconductor Solutions) |
| Date | 2022-01-31 |
| Paper # | SDM2021-73 |
| Volume (vol) | vol.121 |
| Number (no) | SDM-365 |
| Page | pp.pp.20-23(SDM), |
| #Pages | 4 |
| Date of Issue | 2022-01-24 (SDM) |