| Presentation | 2021-12-21 [Invited Talk] High-sensitivity, fast detection of terahertz radiation at room temperature using MEMS resonators Kazuhiko Hirakawa, Boqi Qiu, Tianye Niu, Ya Zhang, Naomi Nagai, Nobuaki Watanabe, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | The MEMS doubly clamped beam resonator structure has a typical resonant frequency in the range of several hundred kHz to several MHz, and a high Q-factor of several thousand to ten thousand even at room temperature. We have been studying the terahertz sensing applications of MEMS, focusing on the fact that 1) the mechanical resonant frequency changes very sensitively due to the thermal expansion of the beam, and 2) the heat capacitance of the MEMS beam structure is extremely small, which is suitable for high-speed operation. In this presentation, we would like to introduce a new terahertz detector based on a new operation principle that reads a slight temperature rise due to the absorption of terahertz electromagnetic waves as a resonant frequency shift of a MEMS beam resonator fabricated with a semiconductor heterostructure. We show that the present MEMS detectors are faster by 10 to 100 times than conventional room temperature thermal sensors. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | MEMS / terahertz electromagnetic wave / thermal sensor / bolometer |
| Paper # | ED2021-59 |
| Date of Issue | 2021-12-13 (ED) |
| Conference Information | |
| Committee | ED |
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| Conference Date | 2021/12/20(2days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | Hiroki Fujishiro(Tokyo Univ. of Science) |
| Vice Chair | Seiya Sakai(Hokkaido Univ.) |
| Secretary | Seiya Sakai(Fjitsu Lab.) |
| Assistant | Ryota Isonoi(SCIOCS) / Yoshitugu Yamamoto(Mitsubishi Electric) |
| Paper Information | |
| Registration To | Technical Committee on Electron Devices |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | [Invited Talk] High-sensitivity, fast detection of terahertz radiation at room temperature using MEMS resonators |
| Sub Title (in English) | |
| Keyword(1) | MEMS |
| Keyword(2) | terahertz electromagnetic wave |
| Keyword(3) | thermal sensor |
| Keyword(4) | bolometer |
| 1st Author's Name | Kazuhiko Hirakawa |
| 1st Author's Affiliation | University of Tokyo(UTokyo) |
| 2nd Author's Name | Boqi Qiu |
| 2nd Author's Affiliation | University of Tokyo(UTokyo) |
| 3rd Author's Name | Tianye Niu |
| 3rd Author's Affiliation | University of Tokyo(UTokyo) |
| 4th Author's Name | Ya Zhang |
| 4th Author's Affiliation | Tokyo University of Agriculture and Technology(TUAT) |
| 5th Author's Name | Naomi Nagai |
| 5th Author's Affiliation | University of Tokyo(UTokyo) |
| 6th Author's Name | Nobuaki Watanabe |
| 6th Author's Affiliation | University of Tokyo(UTokyo) |
| Date | 2021-12-21 |
| Paper # | ED2021-59 |
| Volume (vol) | vol.121 |
| Number (no) | ED-309 |
| Page | pp.pp.53-57(ED), |
| #Pages | 5 |
| Date of Issue | 2021-12-13 (ED) |