Presentation 2021-11-26
Estimation of electrical characteristics of normally-off type AlGaN/GaN MIS-HEMTs with SiO2/Al2O3 double insulators fabricated by ALD
Keitaro Toda, Toshiharu Kubo, Takashi Egawa,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English)
Keyword(in Japanese) (See Japanese page)
Keyword(in English)
Paper # ED2021-31,CPM2021-65,LQE2021-43
Date of Issue 2021-11-18 (ED, CPM, LQE)

Conference Information
Committee ED / CPM / LQE
Conference Date 2021/11/25(2days)
Place (in Japanese) (See Japanese page)
Place (in English) Online
Topics (in Japanese) (See Japanese page)
Topics (in English)
Chair Hiroki Fujishiro(Tokyo Univ. of Science) / Yuichi Nakamura(Toyohashi Univ. of Tech.) / Toshitada Umezawa(NICT)
Vice Chair Seiya Sakai(Hokkaido Univ.) / Hideki Nakazawa(Hirosaki Univ.) / Junichi Takahara(Osaka Univ.)
Secretary Seiya Sakai(Fjitsu Lab.) / Hideki Nakazawa(NTT) / Junichi Takahara(Ehime Univ.)
Assistant Ryota Isonoi(SCIOCS) / Yoshitugu Yamamoto(Mitsubishi Electric) / Yasuo Kimura(Tokyo Univ. of Tech.) / Fumihiko Hirose(Yamagata Univ.) / Noriko Bamba(Shinshu Univ.) / Shinsuke Tanaka(Fujitsu) / Nobuhiko Nishiyama(Tokyo Inst. of Tech.)

Paper Information
Registration To Technical Committee on Electron Devices / Technical Committee on Component Parts and Materials / Technical Committee on Lasers and Quantum Electronics
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Estimation of electrical characteristics of normally-off type AlGaN/GaN MIS-HEMTs with SiO2/Al2O3 double insulators fabricated by ALD
Sub Title (in English)
Keyword(1)
1st Author's Name Keitaro Toda
1st Author's Affiliation Nagoya Institute of Technology(NITech)
2nd Author's Name Toshiharu Kubo
2nd Author's Affiliation Nagoya Institute of Technology(NITech)
3rd Author's Name Takashi Egawa
3rd Author's Affiliation Nagoya Institute of Technology(NITech)
Date 2021-11-26
Paper # ED2021-31,CPM2021-65,LQE2021-43
Volume (vol) vol.121
Number (no) ED-259,CPM-260,LQE-261
Page pp.pp.75-78(ED), pp.75-78(CPM), pp.75-78(LQE),
#Pages 4
Date of Issue 2021-11-18 (ED, CPM, LQE)