Presentation | 2021-10-21 Statistical analysis of RTN behavior on transistor structure, operating region, and carrier transport direction Ryo Akimoto, Rihito Kuroda, Takezo Mawaki, Shigotoshi Sugawa, |
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PDF Download Page | PDF download Page Link |
Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | |
Paper # | SDM2021-52 |
Date of Issue | 2021-10-14 (SDM) |
Conference Information | |
Committee | SDM |
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Conference Date | 2021/10/21(1days) |
Place (in Japanese) | (See Japanese page) |
Place (in English) | Online |
Topics (in Japanese) | (See Japanese page) |
Topics (in English) | Process Science and New Process Technology |
Chair | Hiroshige Hirano(TowerPartners Semiconductor) |
Vice Chair | Shunichiro Ohmi(Tokyo Inst. of Tech.) |
Secretary | Shunichiro Ohmi(AIST) |
Assistant | Taiji Noda(Panasonic) / Tomoyuki Suwa(Tohoku Univ.) |
Paper Information | |
Registration To | Technical Committee on Silicon Device and Materials |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Statistical analysis of RTN behavior on transistor structure, operating region, and carrier transport direction |
Sub Title (in English) | |
Keyword(1) | |
1st Author's Name | Ryo Akimoto |
1st Author's Affiliation | Tohoku University(Tohoku Univ.) |
2nd Author's Name | Rihito Kuroda |
2nd Author's Affiliation | Tohoku University(Tohoku Univ.) |
3rd Author's Name | Takezo Mawaki |
3rd Author's Affiliation | Tohoku University(Tohoku Univ.) |
4th Author's Name | Shigotoshi Sugawa |
4th Author's Affiliation | Tohoku University(Tohoku Univ.) |
Date | 2021-10-21 |
Paper # | SDM2021-52 |
Volume (vol) | vol.121 |
Number (no) | SDM-212 |
Page | pp.pp.27-32(SDM), |
#Pages | 6 |
Date of Issue | 2021-10-14 (SDM) |