Presentation 2021-10-22
Theoretical and Experimental Investigation of OMA Penalty by Inter-Arm Imbalance in Mach-Zehnder Silicon Optical Modulators
Tadashi Murao, Jun Ushida, Hiroyuki Takahashi, Masatoshi Tokushima, Akemi Shiina, Tsuyoshi Horikawa,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English) In this paper, an inter-arm imbalance and its impact on the optical modulation amplitude (OMA) are investigated for carrier-depletion Mach-Zehnder (MZ) silicon optical modulators. First, we propose a generalized form of the large-signal modulation efficiency (ME) that takes the nonlinear response to the voltages into account. It is revealed that this beneficial expression can serve as characterizing the inter-arm imbalance effectively and that the imbalance causes a push-pull imbalance. A beneficial quantification of the imbalance is proposed, namely, a push-pull-imbalanced penalty (PPIP), which is associated with the impact on device performance. The evaluation of the PPIP is demonstrated for the fabricated modulators on a 300-mm SOI wafer. The validity of the derivation is also confirmed by establishing a wafer-level fully-automated evaluation technique for the extinction ratio. Then, it is shown that another inter-arm imbalance also causes an OMA penalty in terms of the absorption loss and is quantified, namely, an absorption-loss-imbalanced penalty (ALIP). In order to evaluate this, we establish a methodology to measure the absorption loss in each arm separately without exploiting any special test element groups (TEGs).
Keyword(in Japanese) (See Japanese page)
Keyword(in English) Wafer-level testing / Silicon modulator / Modulation efficiency / Optical modulation amplitude
Paper # OCS2021-19,OPE2021-39,LQE2021-18
Date of Issue 2021-10-15 (OCS, OPE, LQE)

Conference Information
Committee OCS / OPE / LQE
Conference Date 2021/10/22(1days)
Place (in Japanese) (See Japanese page)
Place (in English) Online
Topics (in Japanese) (See Japanese page)
Topics (in English)
Chair Takeshi Hoshida(Fujitsu) / Takaaki Ishigure(Keio Univ.) / Toshitada Umezawa(NICT)
Vice Chair / Toshikazu Hashimoto(NTT) / Junichi Takahara(Osaka Univ.)
Secretary (NTT) / Toshikazu Hashimoto(Fujikura) / Junichi Takahara(Tokushima Univ.)
Assistant / Hirokazu Kobayashi(Kochi Univ. of Tech) / Tadashi Murao(Mitsubishi Electric) / Shinsuke Tanaka(Fujitsu) / Nobuhiko Nishiyama(Tokyo Inst. of Tech.)

Paper Information
Registration To Technical Committee on Optical Communication Systems / Technical Committee on OptoElectronics / Technical Committee on Lasers and Quantum Electronics
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Theoretical and Experimental Investigation of OMA Penalty by Inter-Arm Imbalance in Mach-Zehnder Silicon Optical Modulators
Sub Title (in English)
Keyword(1) Wafer-level testing
Keyword(2) Silicon modulator
Keyword(3) Modulation efficiency
Keyword(4) Optical modulation amplitude
1st Author's Name Tadashi Murao
1st Author's Affiliation Photonics Electronics Technology Research Association(PETRA)
2nd Author's Name Jun Ushida
2nd Author's Affiliation Photonics Electronics Technology Research Association(PETRA)
3rd Author's Name Hiroyuki Takahashi
3rd Author's Affiliation Photonics Electronics Technology Research Association(PETRA)
4th Author's Name Masatoshi Tokushima
4th Author's Affiliation Photonics Electronics Technology Research Association(PETRA)
5th Author's Name Akemi Shiina
5th Author's Affiliation Photonics Electronics Technology Research Association(PETRA)
6th Author's Name Tsuyoshi Horikawa
6th Author's Affiliation Photonics Electronics Technology Research Association(PETRA)
Date 2021-10-22
Paper # OCS2021-19,OPE2021-39,LQE2021-18
Volume (vol) vol.121
Number (no) OCS-213,OPE-214,LQE-215
Page pp.pp.33-38(OCS), pp.33-38(OPE), pp.33-38(LQE),
#Pages 6
Date of Issue 2021-10-15 (OCS, OPE, LQE)