| Presentation | 2021-10-22 Compact Model and Parametric Extraction for Optical Phase Shifters in Carrier-Depletion Mach-Zehnder Silicon Modulators Tadashi Murao, Jun Ushida, Hiroyuki Takahashi, Masatoshi Tokushima, Akemi Shiina, Tsuyoshi Horikawa, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Testing processes in silicon photonics are totally different from electronics and reduction of testing time has been an major issue. In this paper, a compact model of optical phase shifters is constructed for carrier-depletion Mach-Zehnder (MZ) silicon modulators in the push-pull regime. The target characteristics of the extinction ratio (ER), absorption loss, and chirp parameter are suitably expressed in terms of parameters representing the voltages-dependent modulation efficiency (ME) and the imaginary part of effective index with simple forms. The parameters reflecting manufacturing variability can be extracted from the no time-consuming DC measurements, realizing the testing in a short time. The theoretical concept relies on the proposal of a generalized form of the large-signal ME and its beneficial approximation for the model construction, where the conventional small- and large-signal definitions cannot be applied to the model construction or lead to cumbersome and non-intuitive formulation. It is shown that the constructed model suitably explains the physics and the reported experimental results for the slightly positive chirp characteristics of balanced phase shifters. Moreover, a parametric extraction applying the model is demonstrated in the C-band wavelength on a 300-mm SOI wafer. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Wafer-level testing / Compact model / Silicon modulator / Modulation efficiency |
| Paper # | OCS2021-18,OPE2021-38,LQE2021-17 |
| Date of Issue | 2021-10-15 (OCS, OPE, LQE) |
| Conference Information | |
| Committee | OCS / OPE / LQE |
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| Conference Date | 2021/10/22(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Online |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | Takeshi Hoshida(Fujitsu) / Takaaki Ishigure(Keio Univ.) / Toshitada Umezawa(NICT) |
| Vice Chair | / Toshikazu Hashimoto(NTT) / Junichi Takahara(Osaka Univ.) |
| Secretary | (NTT) / Toshikazu Hashimoto(Fujikura) / Junichi Takahara(Tokushima Univ.) |
| Assistant | / Hirokazu Kobayashi(Kochi Univ. of Tech) / Tadashi Murao(Mitsubishi Electric) / Shinsuke Tanaka(Fujitsu) / Nobuhiko Nishiyama(Tokyo Inst. of Tech.) |
| Paper Information | |
| Registration To | Technical Committee on Optical Communication Systems / Technical Committee on OptoElectronics / Technical Committee on Lasers and Quantum Electronics |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Compact Model and Parametric Extraction for Optical Phase Shifters in Carrier-Depletion Mach-Zehnder Silicon Modulators |
| Sub Title (in English) | |
| Keyword(1) | Wafer-level testing |
| Keyword(2) | Compact model |
| Keyword(3) | Silicon modulator |
| Keyword(4) | Modulation efficiency |
| 1st Author's Name | Tadashi Murao |
| 1st Author's Affiliation | Photonics Electronics Technology Research Association(PETRA) |
| 2nd Author's Name | Jun Ushida |
| 2nd Author's Affiliation | Photonics Electronics Technology Research Association(PETRA) |
| 3rd Author's Name | Hiroyuki Takahashi |
| 3rd Author's Affiliation | Photonics Electronics Technology Research Association(PETRA) |
| 4th Author's Name | Masatoshi Tokushima |
| 4th Author's Affiliation | Photonics Electronics Technology Research Association(PETRA) |
| 5th Author's Name | Akemi Shiina |
| 5th Author's Affiliation | Photonics Electronics Technology Research Association(PETRA) |
| 6th Author's Name | Tsuyoshi Horikawa |
| 6th Author's Affiliation | Photonics Electronics Technology Research Association(PETRA) |
| Date | 2021-10-22 |
| Paper # | OCS2021-18,OPE2021-38,LQE2021-17 |
| Volume (vol) | vol.121 |
| Number (no) | OCS-213,OPE-214,LQE-215 |
| Page | pp.pp.27-32(OCS), pp.27-32(OPE), pp.27-32(LQE), |
| #Pages | 6 |
| Date of Issue | 2021-10-15 (OCS, OPE, LQE) |