Presentation 2021-05-27
[Invited Talk] Thermoelectric properties of Si nanostructures and their characterization techniques
Hiroya Ikeda,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English) The enhancement of the thermoelectric performance has been expected by Si nanostrucutres. The Si Seebeck coefficient is strongly dependent upon the influence of phonon drag, which, however, is not sufficiently understood yet. In the present report, we discussed on the contribution of phonon drag to the Seebeck coefficient in ultrathin Si-on-insulator (SOI) layers and Si microribbon structures from the viewpoint of phonon transport, based on the experimental results of the Seebeck coefficient. In addition, with the aim of measuring the Seebeck coefficient of nanometer-scale materials, we have developed a novel technique using Kelvin-probe force microscopy (KFM) and demonstrate the evaluation of Seebeck coefficient of ultrathin SOI.A novel thermal-diffusivity evaluation by scanning electron microscopy (SEM) together with infrared (IR) thermography is also demonstrated to be applicable for nanowire materials.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) Seebeck coefficient / phonon drag / Kelvin-probe force microscopy / thermal diffusivity / AC calorimetory
Paper # ED2021-1,CPM2021-1,SDM2021-12
Date of Issue 2021-05-20 (ED, CPM, SDM)

Conference Information
Committee ED / SDM / CPM
Conference Date 2021/5/27(1days)
Place (in Japanese) (See Japanese page)
Place (in English) Online
Topics (in Japanese) (See Japanese page)
Topics (in English)
Chair Michihiko Suhara(TMU) / Hiroshige Hirano(TowerPartners Semiconductor) / Mayumi Takeyama(Kitami Inst. of Tech.)
Vice Chair Hiroki Fujishiro(Tokyo Univ. of Science) / Shunichiro Ohmi(Tokyo Inst. of Tech.) / Yuichi Nakamura(Toyohashi Univ. of Tech.)
Secretary Hiroki Fujishiro(Toyama Pref. Univ.) / Shunichiro Ohmi(Fjitsu Lab.) / Yuichi Nakamura(AIST)
Assistant Takuya Tsutsumi(NTT) / Taiji Noda(Panasonic) / Tomoyuki Suwa(Tohoku Univ.) / Yasuo Kimura(Tokyo Univ. of Tech.) / Tomoaki Terasako(Ehime Univ.) / Fumihiko Hirose(Yamagata Univ.)

Paper Information
Registration To Technical Committee on Electron Devices / Technical Committee on Silicon Device and Materials / Technical Committee on Component Parts and Materials
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) [Invited Talk] Thermoelectric properties of Si nanostructures and their characterization techniques
Sub Title (in English)
Keyword(1) Seebeck coefficient
Keyword(2) phonon drag
Keyword(3) Kelvin-probe force microscopy
Keyword(4) thermal diffusivity
Keyword(5) AC calorimetory
1st Author's Name Hiroya Ikeda
1st Author's Affiliation Shizuoka University(Shizuoka Univ.)
Date 2021-05-27
Paper # ED2021-1,CPM2021-1,SDM2021-12
Volume (vol) vol.121
Number (no) ED-44,CPM-45,SDM-46
Page pp.pp.1-6(ED), pp.1-6(CPM), pp.1-6(SDM),
#Pages 6
Date of Issue 2021-05-20 (ED, CPM, SDM)