Presentation | 2021-05-27 [Invited Talk] Thermoelectric properties of Si nanostructures and their characterization techniques Hiroya Ikeda, |
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PDF Download Page | PDF download Page Link |
Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | The enhancement of the thermoelectric performance has been expected by Si nanostrucutres. The Si Seebeck coefficient is strongly dependent upon the influence of phonon drag, which, however, is not sufficiently understood yet. In the present report, we discussed on the contribution of phonon drag to the Seebeck coefficient in ultrathin Si-on-insulator (SOI) layers and Si microribbon structures from the viewpoint of phonon transport, based on the experimental results of the Seebeck coefficient. In addition, with the aim of measuring the Seebeck coefficient of nanometer-scale materials, we have developed a novel technique using Kelvin-probe force microscopy (KFM) and demonstrate the evaluation of Seebeck coefficient of ultrathin SOI.A novel thermal-diffusivity evaluation by scanning electron microscopy (SEM) together with infrared (IR) thermography is also demonstrated to be applicable for nanowire materials. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | Seebeck coefficient / phonon drag / Kelvin-probe force microscopy / thermal diffusivity / AC calorimetory |
Paper # | ED2021-1,CPM2021-1,SDM2021-12 |
Date of Issue | 2021-05-20 (ED, CPM, SDM) |
Conference Information | |
Committee | ED / SDM / CPM |
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Conference Date | 2021/5/27(1days) |
Place (in Japanese) | (See Japanese page) |
Place (in English) | Online |
Topics (in Japanese) | (See Japanese page) |
Topics (in English) | |
Chair | Michihiko Suhara(TMU) / Hiroshige Hirano(TowerPartners Semiconductor) / Mayumi Takeyama(Kitami Inst. of Tech.) |
Vice Chair | Hiroki Fujishiro(Tokyo Univ. of Science) / Shunichiro Ohmi(Tokyo Inst. of Tech.) / Yuichi Nakamura(Toyohashi Univ. of Tech.) |
Secretary | Hiroki Fujishiro(Toyama Pref. Univ.) / Shunichiro Ohmi(Fjitsu Lab.) / Yuichi Nakamura(AIST) |
Assistant | Takuya Tsutsumi(NTT) / Taiji Noda(Panasonic) / Tomoyuki Suwa(Tohoku Univ.) / Yasuo Kimura(Tokyo Univ. of Tech.) / Tomoaki Terasako(Ehime Univ.) / Fumihiko Hirose(Yamagata Univ.) |
Paper Information | |
Registration To | Technical Committee on Electron Devices / Technical Committee on Silicon Device and Materials / Technical Committee on Component Parts and Materials |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | [Invited Talk] Thermoelectric properties of Si nanostructures and their characterization techniques |
Sub Title (in English) | |
Keyword(1) | Seebeck coefficient |
Keyword(2) | phonon drag |
Keyword(3) | Kelvin-probe force microscopy |
Keyword(4) | thermal diffusivity |
Keyword(5) | AC calorimetory |
1st Author's Name | Hiroya Ikeda |
1st Author's Affiliation | Shizuoka University(Shizuoka Univ.) |
Date | 2021-05-27 |
Paper # | ED2021-1,CPM2021-1,SDM2021-12 |
Volume (vol) | vol.121 |
Number (no) | ED-44,CPM-45,SDM-46 |
Page | pp.pp.1-6(ED), pp.1-6(CPM), pp.1-6(SDM), |
#Pages | 6 |
Date of Issue | 2021-05-20 (ED, CPM, SDM) |