| Presentation | 2021-03-03 Low-temperature TiO2 chemical vapor deposition using an atmospheric remote plasma system Nazir MD Shajed, Kazuki Yoshida, Kentaro Saito, Bashir Ahmmad, Shigeru Kubota, Fumihiko hirose, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | |
| Paper # | CPM2020-67 |
| Date of Issue | 2021-02-24 (CPM) |
| Conference Information | |
| Committee | CPM |
|---|---|
| Conference Date | 2021/3/3(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Online |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | Mayumi Takeyama(Kitami Inst. of Tech.) |
| Vice Chair | Yuichi Nakamura(Toyohashi Univ. of Tech.) |
| Secretary | Yuichi Nakamura(Hirosaki Univ.) |
| Assistant | Yasuo Kimura(Tokyo Univ. of Tech.) / Tomoaki Terasako(Ehime Univ.) / Fumihiko Hirose(Yamagata Univ.) |
| Paper Information | |
| Registration To | Technical Committee on Component Parts and Materials |
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| Language | ENG-JTITLE |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Low-temperature TiO2 chemical vapor deposition using an atmospheric remote plasma system |
| Sub Title (in English) | |
| Keyword(1) | |
| 1st Author's Name | Nazir MD Shajed |
| 1st Author's Affiliation | Yamagata University(Yamagata Univ) |
| 2nd Author's Name | Kazuki Yoshida |
| 2nd Author's Affiliation | Yamagata University(Yamagata Univ) |
| 3rd Author's Name | Kentaro Saito |
| 3rd Author's Affiliation | Yamagata University(Yamagata Univ) |
| 4th Author's Name | Bashir Ahmmad |
| 4th Author's Affiliation | Yamagata University(Yamagata Univ) |
| 5th Author's Name | Shigeru Kubota |
| 5th Author's Affiliation | Yamagata University(Yamagata Univ) |
| 6th Author's Name | Fumihiko hirose |
| 6th Author's Affiliation | Yamagata University(Yamagata Univ) |
| Date | 2021-03-03 |
| Paper # | CPM2020-67 |
| Volume (vol) | vol.120 |
| Number (no) | CPM-408 |
| Page | pp.pp.46-47(CPM), |
| #Pages | 2 |
| Date of Issue | 2021-02-24 (CPM) |