| Presentation | 2021-03-03 Fabrication of zinc oxide thin film by atomic layer deposition and trial production of thin film transistor Naoya Onizawa, Keito Sogai, Kazuki Yoshida, Kentarou Saitou, Kensaku Kanomata, Masanori Miura, Bashir Ahmmad, Shigeru Kubota, Fumihiko Hirose, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | |
| Paper # | CPM2020-76 |
| Date of Issue | 2021-02-24 (CPM) |
| Conference Information | |
| Committee | CPM |
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| Conference Date | 2021/3/3(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Online |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | Mayumi Takeyama(Kitami Inst. of Tech.) |
| Vice Chair | Yuichi Nakamura(Toyohashi Univ. of Tech.) |
| Secretary | Yuichi Nakamura(Hirosaki Univ.) |
| Assistant | Yasuo Kimura(Tokyo Univ. of Tech.) / Tomoaki Terasako(Ehime Univ.) / Fumihiko Hirose(Yamagata Univ.) |
| Paper Information | |
| Registration To | Technical Committee on Component Parts and Materials |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Fabrication of zinc oxide thin film by atomic layer deposition and trial production of thin film transistor |
| Sub Title (in English) | |
| Keyword(1) | |
| 1st Author's Name | Naoya Onizawa |
| 1st Author's Affiliation | Yamagata University(Yamagata Univ.) |
| 2nd Author's Name | Keito Sogai |
| 2nd Author's Affiliation | Yamagata University(Yamagata Univ.) |
| 3rd Author's Name | Kazuki Yoshida |
| 3rd Author's Affiliation | Yamagata University(Yamagata Univ.) |
| 4th Author's Name | Kentarou Saitou |
| 4th Author's Affiliation | Yamagata University(Yamagata Univ.) |
| 5th Author's Name | Kensaku Kanomata |
| 5th Author's Affiliation | Yamagata University(Yamagata Univ.) |
| 6th Author's Name | Masanori Miura |
| 6th Author's Affiliation | Yamagata University(Yamagata Univ.) |
| 7th Author's Name | Bashir Ahmmad |
| 7th Author's Affiliation | Yamagata University(Yamagata Univ.) |
| 8th Author's Name | Shigeru Kubota |
| 8th Author's Affiliation | Yamagata University(Yamagata Univ.) |
| 9th Author's Name | Fumihiko Hirose |
| 9th Author's Affiliation | Yamagata University(Yamagata Univ.) |
| Date | 2021-03-03 |
| Paper # | CPM2020-76 |
| Volume (vol) | vol.120 |
| Number (no) | CPM-408 |
| Page | pp.pp.71-73(CPM), |
| #Pages | 3 |
| Date of Issue | 2021-02-24 (CPM) |