| Presentation | 2021-02-22 オンチップ検出に向けたグラフェン型表面応力センサの作製と評価 Ken Arano, Junpei Uesaka, Rintarou Tsubouchi, Ryouto Kanamori, Shin Kidane, Eriko Hurusawa, Takeshi Hizawa, Daisuke Akai, Yoshiko Noda, Yong-Joon Choi, Toshihiko Noda, Kazuaki Sawada, Kazuhiro Takahashi, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | A surface stress sensor fabricated by MEMS technology can detect biomacromolecules such as protein with label- free manner. This sensor detects adsorbed molecules by measuring the deformation of the membrane caused by interaction between molecules immobilized to the membrane. Graphene as a 2D material offers highly sensitive surface stress sensor owing to ultra-thin and light weight. We developed a surface stress sensor using suspended graphene and demonstrated detection of human serum albumin antigen at a final concentration of 1 pg/mL. We also investigated monolithic integration of the graphene- based surface stress sensor and CMOS detection circuits which can readout as electrical signal the adsorption of molecules. In order to transfer graphene onto the integrated circuit, a chemical mechanical polishing process was added to reduce surface roughness and resist removal process was changed. Suspended graphene was also confirmed by SEM observation, which means that graphene-based surface stress sensor was successfully integrated with CMOS circuit. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Graphene / Optical interference / Surface stress sensor / CMOS-MEMS |
| Paper # | ED2020-39 |
| Date of Issue | 2021-02-15 (ED) |
| Conference Information | |
| Committee | ED |
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| Conference Date | 2021/2/22(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Online |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Sensors, MEMS, General |
| Chair | Michihiko Suhara(TMU) |
| Vice Chair | Hiroki Fujishiro(Tokyo Univ. of Science) |
| Secretary | Hiroki Fujishiro(Toyama Pref. Univ.) |
| Assistant | Takuya Tsutsumi(NTT) |
| Paper Information | |
| Registration To | Technical Committee on Electron Devices |
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| Language | JPN-ONLY |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | |
| Sub Title (in English) | |
| Keyword(1) | Graphene |
| Keyword(2) | Optical interference |
| Keyword(3) | Surface stress sensor |
| Keyword(4) | CMOS-MEMS |
| 1st Author's Name | Ken Arano |
| 1st Author's Affiliation | Toyohashi University of Technology(TUT) |
| 2nd Author's Name | Junpei Uesaka |
| 2nd Author's Affiliation | Toyohashi University of Technology(TUT) |
| 3rd Author's Name | Rintarou Tsubouchi |
| 3rd Author's Affiliation | Toyohashi University of Technology(TUT) |
| 4th Author's Name | Ryouto Kanamori |
| 4th Author's Affiliation | Toyohashi University of Technology(TUT) |
| 5th Author's Name | Shin Kidane |
| 5th Author's Affiliation | Toyohashi University of Technology(TUT) |
| 6th Author's Name | Eriko Hurusawa |
| 6th Author's Affiliation | Toyohashi University of Technology(TUT) |
| 7th Author's Name | Takeshi Hizawa |
| 7th Author's Affiliation | Toyohashi University of Technology(TUT) |
| 8th Author's Name | Daisuke Akai |
| 8th Author's Affiliation | Toyohashi University of Technology(TUT) |
| 9th Author's Name | Yoshiko Noda |
| 9th Author's Affiliation | Toyohashi University of Technology(TUT) |
| 10th Author's Name | Yong-Joon Choi |
| 10th Author's Affiliation | Toyohashi University of Technology(TUT) |
| 11th Author's Name | Toshihiko Noda |
| 11th Author's Affiliation | Toyohashi University of Technology(TUT) |
| 12th Author's Name | Kazuaki Sawada |
| 12th Author's Affiliation | Toyohashi University of Technology(TUT) |
| 13th Author's Name | Kazuhiro Takahashi |
| 13th Author's Affiliation | Toyohashi University of Technology(TUT) |
| Date | 2021-02-22 |
| Paper # | ED2020-39 |
| Volume (vol) | vol.120 |
| Number (no) | ED-378 |
| Page | pp.pp.5-8(ED), |
| #Pages | 4 |
| Date of Issue | 2021-02-15 (ED) |