| Presentation | 2021-02-05 Characteristic properties of Co?Zr alloy as a single?layer barrier Yuki Yamada, Masataka Yahagi, Junichi Koike, |
|---|---|
| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | The purpose of this work is to replace the thick double layer of Ta liner and TaN barrier with a single layer of Co alloy having liner/barrier functions with thermally stable amorphous structure. The CALPHAD method was employed to calculate T0 curve as an indicator of amorphous stability in various Co alloy systems. Co-Zr system was predicted to be a potential candidate. Based on the calculated results, ultra-thin Co-Zr films were investigated for adhesion and barrier property. Cu/Co-Zr/SiO2 samples exhibited a good barrier property. However, the Co-Zr layer was decomposed at high temperature, which caused an increase in film resistivity due to Co diffusion to the Cu overlayer. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | LSI / Cu interconnect / diffusion barrier / CALPHAD method |
| Paper # | SDM2020-56 |
| Date of Issue | 2021-01-29 (SDM) |
| Conference Information | |
| Committee | SDM |
|---|---|
| Conference Date | 2021/2/5(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Online |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | Hiroshige Hirano(TowerPartners Semiconductor) |
| Vice Chair | Shunichiro Ohmi(Tokyo Inst. of Tech.) |
| Secretary | Shunichiro Ohmi(AIST) |
| Assistant | Taiji Noda(Panasonic) / Tomoyuki Suwa(Tohoku Univ.) |
| Paper Information | |
| Registration To | Technical Committee on Silicon Device and Materials |
|---|---|
| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Characteristic properties of Co?Zr alloy as a single?layer barrier |
| Sub Title (in English) | |
| Keyword(1) | LSI |
| Keyword(2) | Cu interconnect |
| Keyword(3) | diffusion barrier |
| Keyword(4) | CALPHAD method |
| 1st Author's Name | Yuki Yamada |
| 1st Author's Affiliation | Tohoku University(Tohoku Univ.) |
| 2nd Author's Name | Masataka Yahagi |
| 2nd Author's Affiliation | Tohoku University(Tohoku Univ.) |
| 3rd Author's Name | Junichi Koike |
| 3rd Author's Affiliation | Tohoku University(Tohoku Univ.) |
| Date | 2021-02-05 |
| Paper # | SDM2020-56 |
| Volume (vol) | vol.120 |
| Number (no) | SDM-359 |
| Page | pp.pp.7-10(SDM), |
| #Pages | 4 |
| Date of Issue | 2021-01-29 (SDM) |