Presentation | 2021-02-05 Limitation of barrier property of ultra-thin TaN film Toshihiro Kuge, Masataka Yahagi, Junichi Koike, |
---|---|
PDF Download Page | PDF download Page Link |
Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | |
Paper # | SDM2020-57 |
Date of Issue | 2021-01-29 (SDM) |
Conference Information | |
Committee | SDM |
---|---|
Conference Date | 2021/2/5(1days) |
Place (in Japanese) | (See Japanese page) |
Place (in English) | Online |
Topics (in Japanese) | (See Japanese page) |
Topics (in English) | |
Chair | Hiroshige Hirano(TowerPartners Semiconductor) |
Vice Chair | Shunichiro Ohmi(Tokyo Inst. of Tech.) |
Secretary | Shunichiro Ohmi(AIST) |
Assistant | Taiji Noda(Panasonic) / Tomoyuki Suwa(Tohoku Univ.) |
Paper Information | |
Registration To | Technical Committee on Silicon Device and Materials |
---|---|
Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Limitation of barrier property of ultra-thin TaN film |
Sub Title (in English) | |
Keyword(1) | |
1st Author's Name | Toshihiro Kuge |
1st Author's Affiliation | Tohoku University(Tohoku Univ.) |
2nd Author's Name | Masataka Yahagi |
2nd Author's Affiliation | Tohoku University(Tohoku Univ.) |
3rd Author's Name | Junichi Koike |
3rd Author's Affiliation | Tohoku University(Tohoku Univ.) |
Date | 2021-02-05 |
Paper # | SDM2020-57 |
Volume (vol) | vol.120 |
Number (no) | SDM-359 |
Page | pp.pp.11-14(SDM), |
#Pages | 4 |
Date of Issue | 2021-01-29 (SDM) |