| Presentation | 2021-03-02 A Study of Physical Cleaning Techniques for Semiconductor Devices Yoshiyuki Seike, Tatsuo Mori, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Single-wafer physical wet cleaning using ultrasonic waves, sprays, and brushes is widely used in chip manufacturing. In this report, the principles of ultrasonic spray cleaning, high-pressure spray cleaning, and two-fluid spray are speculated from the viewpoint of macroscopic fluid dynamics, and their characteristics are experimentally confirmed using substrates coated with polystyrene latex (PSL) particles. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Semiconductor devices / Physical cleaning / Ultrasonic spray / Two-fluid spray / High-pressure spray |
| Paper # | OME2020-27 |
| Date of Issue | 2021-02-22 (OME) |
| Conference Information | |
| Committee | OME / IEE-DEI |
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| Conference Date | 2021/3/1(2days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Online |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Organic Molecular Electronics |
| Chair | Yutaka Majima(Tokyo Inst. of Tech.) / 早川 直樹(名古屋大学) |
| Vice Chair | Toshiki Yamada(NICT) |
| Secretary | Toshiki Yamada(Osaka Univ.) / (Tokyo Inst. of Tech.) |
| Assistant | Toshihiko Kaji(Tokyo Univ. of Agriculture and Tech.) / Yoshiyuki Seike(Aichi Inst. of Tech.) / 早瀬 悠二(富士電機) / 村上 義信(豊橋技術科学大学) |
| Paper Information | |
| Registration To | Technical Committee on Organic Molecular Electronics / Technical Meeting on Dielectrics and Electrical Insulation |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | A Study of Physical Cleaning Techniques for Semiconductor Devices |
| Sub Title (in English) | |
| Keyword(1) | Semiconductor devices |
| Keyword(2) | Physical cleaning |
| Keyword(3) | Ultrasonic spray |
| Keyword(4) | Two-fluid spray |
| Keyword(5) | High-pressure spray |
| 1st Author's Name | Yoshiyuki Seike |
| 1st Author's Affiliation | Aichi Institute of Technology(AIT) |
| 2nd Author's Name | Tatsuo Mori |
| 2nd Author's Affiliation | Aichi Institute of Technology(AIT) |
| Date | 2021-03-02 |
| Paper # | OME2020-27 |
| Volume (vol) | vol.120 |
| Number (no) | OME-383 |
| Page | pp.pp.31-34(OME), |
| #Pages | 4 |
| Date of Issue | 2021-02-22 (OME) |