| Presentation | 2020-11-30 Analysis for Degraded MLCC Using Voltage Contrast Method in SEM Akira Saito, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | To ensure the reliability of multi-layer ceramic capacitor (MLCC) while its miniaturization is accelerating, it is necessary to understand the degradation mechanism of BaTiO3 dielectric under high temperature and high electric field. At the first stage of the degradation, oxygen vacancies move towards a cathode side in BaTiO3 dielectric, and electric field concentration is formed near cathode. At the second stage, electric field concentration is formed near cathode and anode by increase in electric current. At the third stage, electric field concentration is formed near anode by further electric current. By using the voltage contrast method in SEM that can be observed at a higher magnification than KFM, it has become possible to measure the potential change of individual particles and grain boundaries near the anode of the degraded MLCC. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | MLCC / Insulation degradation / Voltage cintrast / Oxygen vacancy / Electric field concentration / Schottky barrier |
| Paper # | R2020-27 |
| Date of Issue | 2020-11-23 (R) |
| Conference Information | |
| Committee | R |
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| Conference Date | 2020/11/30(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Online |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Reliability of semiconductor and electronic devices, Reliability general |
| Chair | Akira Asato(Fujitsu) |
| Vice Chair | Tadashi Dohi(Hiroshima Univ.) |
| Secretary | Tadashi Dohi(Hosei Univ.) |
| Assistant | Hiroyuki Okamura(Hiroshima Univ.) / Shinji Yokogawa(Univ. of Electro-Comm.) |
| Paper Information | |
| Registration To | Technical Committee on Reliability |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Analysis for Degraded MLCC Using Voltage Contrast Method in SEM |
| Sub Title (in English) | |
| Keyword(1) | MLCC |
| Keyword(2) | Insulation degradation |
| Keyword(3) | Voltage cintrast |
| Keyword(4) | Oxygen vacancy |
| Keyword(5) | Electric field concentration |
| Keyword(6) | Schottky barrier |
| 1st Author's Name | Akira Saito |
| 1st Author's Affiliation | Murata manufacturing Co., Ltd.(Murata) |
| Date | 2020-11-30 |
| Paper # | R2020-27 |
| Volume (vol) | vol.120 |
| Number (no) | R-267 |
| Page | pp.pp.21-24(R), |
| #Pages | 4 |
| Date of Issue | 2020-11-23 (R) |