| Presentation | 2020-11-20 Research on Vertical Si Slot Waveguide Sensors Shuhei Yoshida, Hiromasa Shimizu, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Highly sensitive gas sensors are required for IOT. Conventional horizontal Si slot waveguide gas sensors are composed of two Si wire waveguides, and confine the light in the slot of air gap part for detecting the difference of the gas concentration. The sensitivity is controlled by width of the slot. By making narrower slot, sensitivity can be improved. The slot width is determined by accuracy of the fabrication technology. In this research, we propose a vertical Si slot waveguide sensors by bonding Ce:YIG magnetic garnet slab waveguide on the Si wire waveguide with air gap. We calculated effective refractive index, optical confinement factor for slot part and the difference of the effective refractive index by magnetization reversal. We investigated the changes of these parameters due to thickness of slot and modulated transmitted light intensity toward higher sensitivity. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | photonic integrated circuit / silicon photonics / slot waveguide / gas sensor / magnetic material / adhesive bonding |
| Paper # | OPE2020-67,LQE2020-47 |
| Date of Issue | 2020-11-13 (OPE, LQE) |
| Conference Information | |
| Committee | OPE / LQE |
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| Conference Date | 2020/11/20(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Online |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | Goji Nakagawa(Fujitsu) / Hiroshi Yasaka(Tohoku Univ.) |
| Vice Chair | Takaaki Ishigure(Keio Univ.) / Toshitada Umezawa(NICT) |
| Secretary | Takaaki Ishigure(Gunma Univ.) / Toshitada Umezawa(Fujikura) |
| Assistant | Junichi Fujikata(PETRA) / Toshio Watanabe(Kagoshima Univ.) / Kazuue Fujita(Hamamatsu) / Nobuhiko Nishiyama(Tokyo Inst. of Tech.) |
| Paper Information | |
| Registration To | Technical Committee on OptoElectronics / Technical Committee on Lasers and Quantum Electronics |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Research on Vertical Si Slot Waveguide Sensors |
| Sub Title (in English) | |
| Keyword(1) | photonic integrated circuit |
| Keyword(2) | silicon photonics |
| Keyword(3) | slot waveguide |
| Keyword(4) | gas sensor |
| Keyword(5) | magnetic material |
| Keyword(6) | adhesive bonding |
| 1st Author's Name | Shuhei Yoshida |
| 1st Author's Affiliation | Tokyo University of Agriculture and Technology(Tokyo univ. of agri. & tech.) |
| 2nd Author's Name | Hiromasa Shimizu |
| 2nd Author's Affiliation | Tokyo University of Agriculture and Technology(Tokyo univ. of agri. & tech.) |
| Date | 2020-11-20 |
| Paper # | OPE2020-67,LQE2020-47 |
| Volume (vol) | vol.120 |
| Number (no) | OPE-243,LQE-244 |
| Page | pp.pp.110-115(OPE), pp.110-115(LQE), |
| #Pages | 6 |
| Date of Issue | 2020-11-13 (OPE, LQE) |