Presentation 2020-12-02
Phase Change Random Access memory using Cu2GeTe3
Shihori Akane, Isao Horiuchi, Mutsumi Kimura,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English) We are conducting research on Phase Change Random Access Memory (PCRAM) using “Cu2GeTe3: Copper-Germanium-Tellurium (CGT)”. The fast crystallization speed and good reversibility between the amorphous and crystalline states make “Ge2Sb2Te5:Germanium-Antimony-Tellurium(GST)” the most popular phase change material. CGT is expected to save energy because its amorphization temperature is lower and cllistallization temperature is higher than that of GST, was used as the phase change material of PCRAM. In this study, we fabricated PCRAM with different CGT film thickness and measured I-V characteristics. All devices showed resistive switching behavior caused by phase change of CGT.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) PCRAM / phase change material / Cu2GeTe3 / amorphous / crystal
Paper # EID2020-13,SDM2020-47
Date of Issue 2020-11-25 (EID, SDM)

Conference Information
Committee EID / SDM / ITE-IDY
Conference Date 2020/12/2(1days)
Place (in Japanese) (See Japanese page)
Place (in English) Online
Topics (in Japanese) (See Japanese page)
Topics (in English)
Chair Rumiko Yamaguchi(Akita Univ.) / Hiroshige Hirano(TowerPartners Semiconductor)
Vice Chair Masahiro Yamaguchi(Tokyo Inst. of Tech.) / Tomoyuki Ishihara(Japan Display) / Shunichiro Ohmi(Tokyo Inst. of Tech.)
Secretary Masahiro Yamaguchi(NTT) / Tomoyuki Ishihara(NHK) / Shunichiro Ohmi(AIST) / (Nihon Univ.)
Assistant Mutsumi Kimura(Ryukoku Univ.) / Tomokazu Shiga(Univ. of Electro-Comm.) / Hiroko Kominami(Shizuoka Univ.) / Masanobu Mizusaki(SHARP) / Masayuki Kanbara(NAIST) / Taiji Noda(Panasonic) / Tomoyuki Suwa(Tohoku Univ.)

Paper Information
Registration To Technical Committee on Electronic Information Displays / Technical Committee on Silicon Device and Materials / Technical Group on Information Display
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Phase Change Random Access memory using Cu2GeTe3
Sub Title (in English)
Keyword(1) PCRAM
Keyword(2) phase change material
Keyword(3) Cu2GeTe3
Keyword(4) amorphous
Keyword(5) crystal
1st Author's Name Shihori Akane
1st Author's Affiliation Ryukoku University(Ryukoku Univ)
2nd Author's Name Isao Horiuchi
2nd Author's Affiliation KOA corporation(KOA Corp)
3rd Author's Name Mutsumi Kimura
3rd Author's Affiliation Ryukoku University(Ryukoku Univ)
Date 2020-12-02
Paper # EID2020-13,SDM2020-47
Volume (vol) vol.120
Number (no) EID-272,SDM-273
Page pp.pp.50-53(EID), pp.50-53(SDM),
#Pages 4
Date of Issue 2020-11-25 (EID, SDM)