| Presentation | 2020-10-29 Preparation of low-temperature-deposited ZrO2 film applicable to RRAM Masaru Sato, Yuki Kawai, Takayuki Mukai, Mayumi B. Takeyama, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | In order to form insulating films applicable to resistive random access memory, we have prepared low-temperature-deposition of ZrO2 film. From XRD results, diffraction lines corresponding to monoclinic ZrO2 (m-ZrO2) and tetragonal ZrO2 (t-ZrO2) phases were seen. XRD results showed that the obtained ZrO2 film consists of mainly stable m-ZrO2 phase. Furthermore, we can demonstrate that the Cu/ZrO2/Pt structure has bipolar switching property with low current values. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Resistive random access memory / ZrO2 film / Bipolar switching property |
| Paper # | CPM2020-21 |
| Date of Issue | 2020-10-22 (CPM) |
| Conference Information | |
| Committee | CPM |
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| Conference Date | 2020/10/29(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Online |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | Mayumi Takeyama(Kitami Inst. of Tech.) |
| Vice Chair | Yuichi Nakamura(Toyohashi Univ. of Tech.) |
| Secretary | Yuichi Nakamura(Hirosaki Univ.) |
| Assistant | Yasuo Kimura(Tokyo Univ. of Tech.) / Tomoaki Terasako(Ehime Univ.) / Fumihiko Hirose(Yamagata Univ.) |
| Paper Information | |
| Registration To | Technical Committee on Component Parts and Materials |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Preparation of low-temperature-deposited ZrO2 film applicable to RRAM |
| Sub Title (in English) | |
| Keyword(1) | Resistive random access memory |
| Keyword(2) | ZrO2 film |
| Keyword(3) | Bipolar switching property |
| 1st Author's Name | Masaru Sato |
| 1st Author's Affiliation | Kitami Institute of Technology(Kitami Inst. of tech.) |
| 2nd Author's Name | Yuki Kawai |
| 2nd Author's Affiliation | Kitami Institute of Technology(Kitami Inst. of tech.) |
| 3rd Author's Name | Takayuki Mukai |
| 3rd Author's Affiliation | Kitami Institute of Technology(Kitami Inst. of tech.) |
| 4th Author's Name | Mayumi B. Takeyama |
| 4th Author's Affiliation | Kitami Institute of Technology(Kitami Inst. of tech.) |
| Date | 2020-10-29 |
| Paper # | CPM2020-21 |
| Volume (vol) | vol.120 |
| Number (no) | CPM-217 |
| Page | pp.pp.38-40(CPM), |
| #Pages | 3 |
| Date of Issue | 2020-10-22 (CPM) |