Presentation | 2020-10-22 Investigation of N-doped LaB6/LaBxNy/Si(100) MIS structure and floating-gate memory applications Kyung Eun Park, Hideki Kamata, Shun-ichiro Ohmi, |
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PDF Download Page | PDF download Page Link |
Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | |
Paper # | SDM2020-16 |
Date of Issue | 2020-10-15 (SDM) |
Conference Information | |
Committee | SDM |
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Conference Date | 2020/10/22(1days) |
Place (in Japanese) | (See Japanese page) |
Place (in English) | virtual conference |
Topics (in Japanese) | (See Japanese page) |
Topics (in English) | Process Science and New Process Technology |
Chair | Hiroshige Hirano(TowerPartners Semiconductor) |
Vice Chair | Shunichiro Ohmi(Tokyo Inst. of Tech.) |
Secretary | Shunichiro Ohmi(AIST) |
Assistant | Taiji Noda(Panasonic) / Tomoyuki Suwa(Tohoku Univ.) |
Paper Information | |
Registration To | Technical Committee on Silicon Device and Materials |
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Language | ENG |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Investigation of N-doped LaB6/LaBxNy/Si(100) MIS structure and floating-gate memory applications |
Sub Title (in English) | |
Keyword(1) | |
1st Author's Name | Kyung Eun Park |
1st Author's Affiliation | Tokyo Institute of Technology(Tokyo Tech) |
2nd Author's Name | Hideki Kamata |
2nd Author's Affiliation | Tokyo Institute of Technology(Tokyo Tech) |
3rd Author's Name | Shun-ichiro Ohmi |
3rd Author's Affiliation | Tokyo Institute of Technology(Tokyo Tech) |
Date | 2020-10-22 |
Paper # | SDM2020-16 |
Volume (vol) | vol.120 |
Number (no) | SDM-205 |
Page | pp.pp.12-15(SDM), |
#Pages | 4 |
Date of Issue | 2020-10-15 (SDM) |