| Presentation | 2020-09-28 Extraction of kt2 of HBAR by new conversion loss without acoustic losses in the substrate Ryota Tatsumi, Yanagitani Takahiko, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | According to the IEEE standard, the resonance-antiresonance method for a self-standing film structure is recommended to determine kt2 of the piezoelectric film. It is convenient and cost-effective to determine the kt2 from the film/wafer structure (HBAR) or epitaxial wafers. kt2 is underestimated due to the acoustic losses in the substrate in the conventional conversion loss (CL) method, which can extract the kt2 from HBAR. In this study, we introduce two CL methods: (i) the method subtracting the acoustic losses in the substrate, (ii) the method using electromagnetic signal including no acoustic losses. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | electromechanical coupling coefficient / HBAR / ScAlN |
| Paper # | US2020-37 |
| Date of Issue | 2020-09-21 (US) |
| Conference Information | |
| Committee | US |
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| Conference Date | 2020/9/28(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Web Meeting |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | Hikaru Miura(Nihon Univ.) |
| Vice Chair | Jun Kondo(Shizuoka Univ.) / Yoshikazu Koike(Shibaura Inst. of Tech.) |
| Secretary | Jun Kondo(Doshisha Univ.) / Yoshikazu Koike(Tohoku Univ.) |
| Assistant | Shinnosuke Hirata(Tokyo Inst. of Tech.) |
| Paper Information | |
| Registration To | Technical Committee on Ultrasonics |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Extraction of kt2 of HBAR by new conversion loss without acoustic losses in the substrate |
| Sub Title (in English) | |
| Keyword(1) | electromechanical coupling coefficient |
| Keyword(2) | HBAR |
| Keyword(3) | ScAlN |
| Keyword(4) | |
| 1st Author's Name | Ryota Tatsumi |
| 1st Author's Affiliation | Waseda University(Waseda Univ.) |
| 2nd Author's Name | Yanagitani Takahiko |
| 2nd Author's Affiliation | Waseda University(Waseda Univ.) |
| Date | 2020-09-28 |
| Paper # | US2020-37 |
| Volume (vol) | vol.120 |
| Number (no) | US-174 |
| Page | pp.pp.57-60(US), |
| #Pages | 4 |
| Date of Issue | 2020-09-21 (US) |