| Presentation | 2020-09-28 Effect of negative ions generated from ScAl sputtering targets on kt2 and crystal orientation of ScAlN thin films Rui Kihara, Shinji Takayanagi, Takahiko Yanagitani, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | ScAlN thin films with large electromechanical coupling coefficient have been attracting attention for the application to wideband BAW filters. Sc ingots usually contain oxygen and carbon impurities. Therefore, this result in the O- and CN- negative ions irradiation to the substrate during the sputtering process. These negative ions irradiation would affect the crystal orientation and electromechanical coupling coefficient, kt2 of the piezoelectric thin films. In this study, the negative ions generated from various ScAl sputtering targets were measured. Crystal orientation and kt2 of ScAlN thin films were investigated. We showed that the difference in the intensity of the negative ions generated from each target affects crystal orientation and kt2. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | ScAlN / Piezoelectric thin film / ScAl sputtering target / Negative ion irradiation |
| Paper # | US2020-36 |
| Date of Issue | 2020-09-21 (US) |
| Conference Information | |
| Committee | US |
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| Conference Date | 2020/9/28(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Web Meeting |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | Hikaru Miura(Nihon Univ.) |
| Vice Chair | Jun Kondo(Shizuoka Univ.) / Yoshikazu Koike(Shibaura Inst. of Tech.) |
| Secretary | Jun Kondo(Doshisha Univ.) / Yoshikazu Koike(Tohoku Univ.) |
| Assistant | Shinnosuke Hirata(Tokyo Inst. of Tech.) |
| Paper Information | |
| Registration To | Technical Committee on Ultrasonics |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Effect of negative ions generated from ScAl sputtering targets on kt2 and crystal orientation of ScAlN thin films |
| Sub Title (in English) | |
| Keyword(1) | ScAlN |
| Keyword(2) | Piezoelectric thin film |
| Keyword(3) | ScAl sputtering target |
| Keyword(4) | Negative ion irradiation |
| 1st Author's Name | Rui Kihara |
| 1st Author's Affiliation | Waseda University(Waseda Univ.) |
| 2nd Author's Name | Shinji Takayanagi |
| 2nd Author's Affiliation | Doshisha University(Doshisha Univ.) |
| 3rd Author's Name | Takahiko Yanagitani |
| 3rd Author's Affiliation | Waseda University(Waseda Univ.) |
| Date | 2020-09-28 |
| Paper # | US2020-36 |
| Volume (vol) | vol.120 |
| Number (no) | US-174 |
| Page | pp.pp.51-56(US), |
| #Pages | 6 |
| Date of Issue | 2020-09-21 (US) |