| Presentation | 2020-09-28 c-Axis tilted ScAlN film piezoelectric transformer in the UHF range Sarina Kinoshita, Takahiko Yanagitani, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Battery-less sensors require energy harvesting from the ambient environment. RF-DC conversion with a rectifying antenna (so-called rectenna) is generally used to obtain energy from ambient electromagnetic waves. However, RF-DC conversion efficiency significantly decreases for weak RF signals such as the ambient electromagnetic waves. In this study, we introduce new types of BAW piezoelectric transformers based on ScAlN thin films in order to amplify the RF signal in the rectenna. The theoretical voltage gain was simulated by Mason’s equivalent circuit model. We also derived the simple formula describing the voltage gain of the BAW piezoelectric transformers without using the circuit model. New simpler model which is enough accurate in the vicinity of the resonant frequency was derived. The new 3 types of BAW piezoelectric transformers (based on (i) c-axis zig-zag HBAR structures, (ii) c-axis zig-zag FBAR structures and (iii) the combination of PZT and ScAlN thin films) were experimentally and theoretically demonstrated. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Piezoelectric transformer / Rectenna / c-Axis tilted ScAlN film / Polarity inverted multilayer piezoelectric film |
| Paper # | US2020-35 |
| Date of Issue | 2020-09-21 (US) |
| Conference Information | |
| Committee | US |
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| Conference Date | 2020/9/28(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Web Meeting |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | Hikaru Miura(Nihon Univ.) |
| Vice Chair | Jun Kondo(Shizuoka Univ.) / Yoshikazu Koike(Shibaura Inst. of Tech.) |
| Secretary | Jun Kondo(Doshisha Univ.) / Yoshikazu Koike(Tohoku Univ.) |
| Assistant | Shinnosuke Hirata(Tokyo Inst. of Tech.) |
| Paper Information | |
| Registration To | Technical Committee on Ultrasonics |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | c-Axis tilted ScAlN film piezoelectric transformer in the UHF range |
| Sub Title (in English) | |
| Keyword(1) | Piezoelectric transformer |
| Keyword(2) | Rectenna |
| Keyword(3) | c-Axis tilted ScAlN film |
| Keyword(4) | Polarity inverted multilayer piezoelectric film |
| 1st Author's Name | Sarina Kinoshita |
| 1st Author's Affiliation | Waseda University/ZAIKEN(Waseda Univ./ZAIKEN) |
| 2nd Author's Name | Takahiko Yanagitani |
| 2nd Author's Affiliation | Waseda University/ZAIKEN/JST CREST(Waseda Univ./ZAIKEN/JST CREST) |
| Date | 2020-09-28 |
| Paper # | US2020-35 |
| Volume (vol) | vol.120 |
| Number (no) | US-174 |
| Page | pp.pp.45-50(US), |
| #Pages | 6 |
| Date of Issue | 2020-09-21 (US) |