| Presentation | 2020-04-13 Metal Source/Drain Structure TFTs using poly-Si Crystallized by Blue Multi-Laser Diode Annealing Tatsuya Okada, Takashi Noguchi, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We have reported that Blue Multi-Laser Diode Annealing (BLDA) is effective to crystallize Si films with smooth surface. Additionally, good performance poly-Si TFTs with metal source/drain structure could be realized without neither impurity doping nor high temperature activation annealing. BLDA and metal source/drain structure TFTs are effective to realize poly-Si TFT on low temperature process. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Blue Multi-Laser Diode Annealing / BLDA / poly-Si / Metal S/D TFT |
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| Conference Information | |
| Committee | SDM / OME |
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| Conference Date | 2020/4/13(2days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Okinawaken Seinen Kaikan |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Thin film devices (Si, compound, organic, flexible), Biotechnology, Materials, Characterization, etc. |
| Chair | Takahiro Shinada(Tohoku Univ.) / Yutaka Majima(Tokyo Inst. of Tech.) |
| Vice Chair | Hiroshige Hirano(TowerJazz Panasonic) / Toshiki Yamada(NICT) |
| Secretary | Hiroshige Hirano(Shizuoka Univ.) / Toshiki Yamada(KIOXIA) |
| Assistant | Takahiro Mori(AIST) / Nobuaki Kobayashi(Nihon Univ.) / Toshihiko Kaji(Tokyo Univ. of Agriculture and Tech.) / Yoshiyuki Seike(Aichi Inst. of Tech.) |
| Paper Information | |
| Registration To | Technical Committee on Silicon Device and Materials / Technical Committee on Organic Molecular Electronics |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Metal Source/Drain Structure TFTs using poly-Si Crystallized by Blue Multi-Laser Diode Annealing |
| Sub Title (in English) | |
| Keyword(1) | Blue Multi-Laser Diode Annealing |
| Keyword(2) | BLDA |
| Keyword(3) | poly-Si |
| Keyword(4) | Metal S/D TFT |
| 1st Author's Name | Tatsuya Okada |
| 1st Author's Affiliation | University of the Ryukyus(Univ. Ryukyus) |
| 2nd Author's Name | Takashi Noguchi |
| 2nd Author's Affiliation | University of the Ryukyus(Univ. Ryukyus) |
| Date | 2020-04-13 |
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| Volume (vol) | vol. |
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| Page | pp.pp.-(), |
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| Date of Issue | |