| Presentation | 2020-02-29 Examination and Prototype Production of Thin Film Type Heater for Contact Epitaxial Method Satoru Noge, |
|---|---|
| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | |
| Paper # | CPM2019-104 |
| Date of Issue | 2020-02-21 (CPM) |
| Conference Information | |
| Committee | CPM |
|---|---|
| Conference Date | 2020/2/28(2days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Presentation Rm., KCB01, Tokyo Univ. of Technol. |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Young Researcher's Conference |
| Chair | Mayumi Takeyama(Kitami Inst. of Tech.) |
| Vice Chair | Yuichi Nakamura(Toyohashi Univ. of Tech.) |
| Secretary | Yuichi Nakamura(Hirosaki Univ.) |
| Assistant | Yasuo Kimura(Tokyo Univ. of Tech.) / Tomoaki Terasako(Ehime Univ.) / Fumihiko Hirose(Yamagata Univ.) |
| Paper Information | |
| Registration To | Technical Committee on Component Parts and Materials |
|---|---|
| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Examination and Prototype Production of Thin Film Type Heater for Contact Epitaxial Method |
| Sub Title (in English) | |
| Keyword(1) | |
| 1st Author's Name | Satoru Noge |
| 1st Author's Affiliation | National Institute of Technology, Numazu College(NIT, Numazu) |
| Date | 2020-02-29 |
| Paper # | CPM2019-104 |
| Volume (vol) | vol.119 |
| Number (no) | CPM-431 |
| Page | pp.pp.51-52(CPM), |
| #Pages | 2 |
| Date of Issue | 2020-02-21 (CPM) |