Presentation 2020-02-28
Consideration of Zn addition method to obtain AZO film with low resistivity by sputtering method
Takuya kanda, Hidehiko Shimizu, Haruo Iwano, Takahiro Kawakami, Yasuo Fukusima, Koutaro Nagata, Kouhei ohkouchi, kouki ikarashi, masakiyo nakano,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English)
Keyword(in Japanese) (See Japanese page)
Keyword(in English)
Paper # CPM2019-93
Date of Issue 2020-02-21 (CPM)

Conference Information
Committee CPM
Conference Date 2020/2/28(2days)
Place (in Japanese) (See Japanese page)
Place (in English) Presentation Rm., KCB01, Tokyo Univ. of Technol.
Topics (in Japanese) (See Japanese page)
Topics (in English) Young Researcher's Conference
Chair Mayumi Takeyama(Kitami Inst. of Tech.)
Vice Chair Yuichi Nakamura(Toyohashi Univ. of Tech.)
Secretary Yuichi Nakamura(Hirosaki Univ.)
Assistant Yasuo Kimura(Tokyo Univ. of Tech.) / Tomoaki Terasako(Ehime Univ.) / Fumihiko Hirose(Yamagata Univ.)

Paper Information
Registration To Technical Committee on Component Parts and Materials
Language JPN-ONLY
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Consideration of Zn addition method to obtain AZO film with low resistivity by sputtering method
Sub Title (in English)
Keyword(1)
1st Author's Name Takuya kanda
1st Author's Affiliation Niigata University(Niigata Univ.)
2nd Author's Name Hidehiko Shimizu
2nd Author's Affiliation Niigata University(Niigata Univ.)
3rd Author's Name Haruo Iwano
3rd Author's Affiliation Niigata University(Niigata Univ.)
4th Author's Name Takahiro Kawakami
4th Author's Affiliation Niigata University(Niigata Univ.)
5th Author's Name Yasuo Fukusima
5th Author's Affiliation Niigata University(Niigata Univ.)
6th Author's Name Koutaro Nagata
6th Author's Affiliation Niigata University(Niigata Univ.)
7th Author's Name Kouhei ohkouchi
7th Author's Affiliation Niigata University(Niigata Univ.)
8th Author's Name kouki ikarashi
8th Author's Affiliation Niigata University(Niigata Univ.)
9th Author's Name masakiyo nakano
9th Author's Affiliation Niigata University(Niigata Univ.)
Date 2020-02-28
Paper # CPM2019-93
Volume (vol) vol.119
Number (no) CPM-431
Page pp.pp.9-12(CPM),
#Pages 4
Date of Issue 2020-02-21 (CPM)