Presentation 2020-02-28
室温原子層堆積法を用いた酸化鉄薄膜の試作と評価
Issei Nagata, Kentarou Saitou, Kensaku Kanomata, Bashir Ahmmad, Masanori Miura, Shigeru Kubota, Fumihiko Hirose,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English)
Keyword(in Japanese) (See Japanese page)
Keyword(in English)
Paper # CPM2019-92
Date of Issue 2020-02-21 (CPM)

Conference Information
Committee CPM
Conference Date 2020/2/28(2days)
Place (in Japanese) (See Japanese page)
Place (in English) Presentation Rm., KCB01, Tokyo Univ. of Technol.
Topics (in Japanese) (See Japanese page)
Topics (in English) Young Researcher's Conference
Chair Mayumi Takeyama(Kitami Inst. of Tech.)
Vice Chair Yuichi Nakamura(Toyohashi Univ. of Tech.)
Secretary Yuichi Nakamura(Hirosaki Univ.)
Assistant Yasuo Kimura(Tokyo Univ. of Tech.) / Tomoaki Terasako(Ehime Univ.) / Fumihiko Hirose(Yamagata Univ.)

Paper Information
Registration To Technical Committee on Component Parts and Materials
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English)
Sub Title (in English)
Keyword(1)
1st Author's Name Issei Nagata
1st Author's Affiliation Yamagata University(Yamagata Univ.)
2nd Author's Name Kentarou Saitou
2nd Author's Affiliation Yamagata University(Yamagata Univ.)
3rd Author's Name Kensaku Kanomata
3rd Author's Affiliation Yamagata University(Yamagata Univ.)
4th Author's Name Bashir Ahmmad
4th Author's Affiliation Yamagata University(Yamagata Univ.)
5th Author's Name Masanori Miura
5th Author's Affiliation Yamagata University(Yamagata Univ.)
6th Author's Name Shigeru Kubota
6th Author's Affiliation Yamagata University(Yamagata Univ.)
7th Author's Name Fumihiko Hirose
7th Author's Affiliation Yamagata University(Yamagata Univ.)
Date 2020-02-28
Paper # CPM2019-92
Volume (vol) vol.119
Number (no) CPM-431
Page pp.pp.5-7(CPM),
#Pages 3
Date of Issue 2020-02-21 (CPM)