Presentation 2020-02-27
Detecting Resistive-Open Defects of Power TSVs in 3D-ICs
Koutaro Hachiya, Atsushi Kurokawa,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English) A method is proposed which detects resistive-open defects of power TSVs in PDNs by measuring resistance between power micro-bumps. Utilizing the monotonically increasing property of the measured resistance between power micro-bumps when the resistance of TSV under test increases, the method defines the minimum defective resistance $R_{¥it min}$ of TSVs and uses it as the resistance of defective TSV in statistical fault simulations. Simulation results of a 3D-IC example with two dies show that the proposed method can detect resistive opens although defect coverage is decreased when $R_{¥it min}$ is decreased.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) 3D-IC / TSV / testing power distribution network / resistive open defect
Paper # CAS2019-104,CS2019-104
Date of Issue 2020-02-20 (CAS, CS)

Conference Information
Committee CS / CAS
Conference Date 2020/2/27(2days)
Place (in Japanese) (See Japanese page)
Place (in English)
Topics (in Japanese) (See Japanese page)
Topics (in English)
Chair Hidenori Nakazato(Waseda Univ.) / Taizo Yamawaki(Hitachi)
Vice Chair Jun Terada(NTT) / Yasuhiro Takashima(Univ. of Kitakyushu)
Secretary Jun Terada(Waseda Univ.) / Yasuhiro Takashima(Mitsubishi Electric)
Assistant Kazutaka Hara(NTT) / Hiroyuki Saito(OKI) / Hiroki Sato(Sony LSI Design) / Motoi Yamaguchi(Renesas Electronics)

Paper Information
Registration To Technical Committee on Communication Systems / Technical Committee on Circuits and Systems
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Detecting Resistive-Open Defects of Power TSVs in 3D-ICs
Sub Title (in English)
Keyword(1) 3D-IC
Keyword(2) TSV
Keyword(3) testing power distribution network
Keyword(4) resistive open defect
1st Author's Name Koutaro Hachiya
1st Author's Affiliation Teikyo Heisei University(Teikyo Heisei Univ.)
2nd Author's Name Atsushi Kurokawa
2nd Author's Affiliation Hirosaki University(Hirosaki Univ.)
Date 2020-02-27
Paper # CAS2019-104,CS2019-104
Volume (vol) vol.119
Number (no) CAS-423,CS-424
Page pp.pp.37-41(CAS), pp.37-41(CS),
#Pages 5
Date of Issue 2020-02-20 (CAS, CS)