Presentation 2020-01-17
Fabrication of SiO_2/Si_xN_y/SiO_2 Membranes for Multipixel Gamma-Ray Transition Edge Sensors with Uniform Characteristics
Takahiro Kikuchi, Kohjiro Satoshi, Go Fujii, Masahiro Ukibe, Masashi Ohno, Ryan Smith, Shintaro Ikuine,
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Abstract(in English)
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Keyword(in English)
Paper # SCE2019-75
Date of Issue 2020-01-09 (SCE)

Conference Information
Committee SCE
Conference Date 2020/1/16(2days)
Place (in Japanese) (See Japanese page)
Place (in English)
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Chair Satoshi Kohjiro(AIST)
Vice Chair
Secretary (Yokohama National Univ.)
Assistant Hiroyuki Akaike(Daido Univ.)

Paper Information
Registration To Technical Committee on Superconductive Electronics
Language ENG-JTITLE
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Fabrication of SiO_2/Si_xN_y/SiO_2 Membranes for Multipixel Gamma-Ray Transition Edge Sensors with Uniform Characteristics
Sub Title (in English)
Keyword(1)
1st Author's Name Takahiro Kikuchi
1st Author's Affiliation National Institute of Advanced Industrial Science and Technology(AIST)
2nd Author's Name Kohjiro Satoshi
2nd Author's Affiliation National Institute of Advanced Industrial Science and Technology(AIST)
3rd Author's Name Go Fujii
3rd Author's Affiliation National Institute of Advanced Industrial Science and Technology(AIST)
4th Author's Name Masahiro Ukibe
4th Author's Affiliation National Institute of Advanced Industrial Science and Technology(AIST)
5th Author's Name Masashi Ohno
5th Author's Affiliation The University of Tokyo(UTokyo)
6th Author's Name Ryan Smith
6th Author's Affiliation The University of Tokyo(UTokyo)
7th Author's Name Shintaro Ikuine
7th Author's Affiliation HiSOL Incorporated(HiSOL)
Date 2020-01-17
Paper # SCE2019-75
Volume (vol) vol.119
Number (no) SCE-369
Page pp.pp.183-187(SCE),
#Pages 5
Date of Issue 2020-01-09 (SCE)