| Presentation | 2019-12-06 Observation of residual stress during film growth of magnetic thin films Shigeki Nakagawa, Hisanori Hayashibara, Masanari Nakagomi, Yoshimasa Ogawa, Yota Takamura, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Residual stress of films during the deposition process contains valuable information of growth mechanisms, such as formation of nano-structure, phase transition, interaction of nano-size grains, etc. We have developed in-situ observation system of internal stress σ using cantilever method to detect deviation of a substrate being deposited of films from the original position. Transitions from islands to continuous structure of Ti and Ru layers were clearly evaluated by observing maximum point of σ?t as a function of nominal thickness t. Surface energy of the materials for deposition of films are important factor to determine critical thickness for the transitions. Abrupt jump of σ?t appeared just after the island-continuous transition in FeCo films is originated from a phase transition from amorphous to crystalline phase. Observation of development of internal stress during the deposition of CoPtCr-SiO2 (CPC-SiO2), granular type films deposited on Ru underlayer in sub-nm thickness region to clarify formation mechanisms of the granular structure. CPC-SiO2 films were deposited at high Ar gas pressure on Ru underlayers which is prepared at various preparation conditions. The growth mechanism of CPC grains seems to be strongly affected by the crystalline orientation of Ru underlayer in the initial stage of the film growth. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Internal residual stress / In-situ observation / Ferromagnetic films / Granular films / Growth mechanism of films |
| Paper # | MRIS2019-45 |
| Date of Issue | 2019-11-28 (MRIS) |
| Conference Information | |
| Committee | MRIS / ITE-MMS |
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| Conference Date | 2019/12/5(2days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Ehime University |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Signal Processing and Others |
| Chair | Satoshi Matsunuma(Maxell) / Norihiko Ishii(NHK) |
| Vice Chair | |
| Secretary | (Toshiba) / (Kinki Univ.) |
| Assistant | Ikuya Tagawa(Tohoku Inst. of Tech.) / Hiroko Arai(AIST) |
| Paper Information | |
| Registration To | Technical Committee on Magnetic Recording & Information Storage / Technical Group on Multi-media Storage |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Observation of residual stress during film growth of magnetic thin films |
| Sub Title (in English) | |
| Keyword(1) | Internal residual stress |
| Keyword(2) | In-situ observation |
| Keyword(3) | Ferromagnetic films |
| Keyword(4) | Granular films |
| Keyword(5) | Growth mechanism of films |
| 1st Author's Name | Shigeki Nakagawa |
| 1st Author's Affiliation | Tokyo Institute of Technology(Tokyo Tech) |
| 2nd Author's Name | Hisanori Hayashibara |
| 2nd Author's Affiliation | Tokyo Institute of Technology(Tokyo Tech) |
| 3rd Author's Name | Masanari Nakagomi |
| 3rd Author's Affiliation | Tokyo Institute of Technology(Tokyo Tech) |
| 4th Author's Name | Yoshimasa Ogawa |
| 4th Author's Affiliation | Tokyo Institute of Technology(Tokyo Tech) |
| 5th Author's Name | Yota Takamura |
| 5th Author's Affiliation | Tokyo Institute of Technology(Tokyo Tech) |
| Date | 2019-12-06 |
| Paper # | MRIS2019-45 |
| Volume (vol) | vol.119 |
| Number (no) | MRIS-326 |
| Page | pp.pp.51-56(MRIS), |
| #Pages | 6 |
| Date of Issue | 2019-11-28 (MRIS) |