| Presentation | 2019-11-08 [Invited Talk] Mapping of metal/semiconductor and semiconductor/semiconductor interfaces using scanning internal photoemission microscopy Kenji Shiojima, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Scanning internal photoemission spectroscopy has been developed to map the electrical characteristics of metal/semiconductor interfaces nondestructively. Our experimental demonstrations of the mapping characterization are reviewed from the aspects of (1) thermal degradation, (2) device degradation by applying high-voltage, (3) process-induced surface damages, (4) grain boundaries of semiconductors and printed metal particles, and (5) expansion to semiconductor/ semiconductor and metal-insulator-semiconductor interfaces. This technique was confirmed to be useful for the development of the wide-bandgap-semiconductor high-power devices. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | wide-bandgap semiconductor / Schottky contacts / scanning internal photoemission microscopy / 2-dimentional characterization |
| Paper # | CPM2019-51 |
| Date of Issue | 2019-10-31 (CPM) |
| Conference Information | |
| Committee | CPM |
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| Conference Date | 2019/11/7(2days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Fukui univ. |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | Mayumi Takeyama(Kitami Inst. of Tech.) |
| Vice Chair | Yuichi Nakamura(Toyohashi Univ. of Tech.) |
| Secretary | Yuichi Nakamura(Hirosaki Univ.) |
| Assistant | Yasuo Kimura(Tokyo Univ. of Tech.) / Tomoaki Terasako(Ehime Univ.) / Fumihiko Hirose(Yamagata Univ.) |
| Paper Information | |
| Registration To | Technical Committee on Component Parts and Materials |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | [Invited Talk] Mapping of metal/semiconductor and semiconductor/semiconductor interfaces using scanning internal photoemission microscopy |
| Sub Title (in English) | |
| Keyword(1) | wide-bandgap semiconductor |
| Keyword(2) | Schottky contacts |
| Keyword(3) | scanning internal photoemission microscopy |
| Keyword(4) | 2-dimentional characterization |
| 1st Author's Name | Kenji Shiojima |
| 1st Author's Affiliation | University of Fukui(Univ. of Fukui) |
| Date | 2019-11-08 |
| Paper # | CPM2019-51 |
| Volume (vol) | vol.119 |
| Number (no) | CPM-271 |
| Page | pp.pp.35-38(CPM), |
| #Pages | 4 |
| Date of Issue | 2019-10-31 (CPM) |